Study on Dynamic Characteristic of a Novel 2-DOF Positioning Mechanism

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Study on Dynamic Characteristic of a Novel 2-DOF Positioning Mechanism

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- Study on Dynamic Characteristic of a Novel 2-DOF Positioning Mechanism
- Optics and Precision Engineering Vol. 16, Issue 5, Pages: 851-855(2008)
- 作者机构：
  
  哈尔滨工业大学机器人研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：08 October 2007，
  
  Revised：01 January 2008，
  
  Published Online：22 May 2008，
  
  Published：22 May 2008
- 稿件说明：
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李娟,刘延杰,孙立宁,马立. 新型2-DOF高加速定位平台的动态性能研究[J]. 光学精密工程, 2008,16(5):851-855

Study on Dynamic Characteristic of a Novel 2-DOF Positioning Mechanism[J]. Optics and precision engineering, 2008, 16(5): 851-855.
李娟,刘延杰,孙立宁,马立. 新型2-DOF高加速定位平台的动态性能研究[J]. 光学精密工程, 2008,16(5):851-855 DOI：

Study on Dynamic Characteristic of a Novel 2-DOF Positioning Mechanism[J]. Optics and precision engineering, 2008, 16(5): 851-855. DOI：

摘要

微电子封装业的迅速发展对封装设备中的运动定位平台的运行速度以及加速度的要求越来越高，研制新型高加速精密定位机构成为十分迫切的任务。针对这种需求，提出一种新型2-DOF平面并联定位机构，它由直线电机直接驱动含有平行四边形支链的并联杆机构来实现末端平台平面内的平动。采用Largrange方程建立了动力学模型，然后基于奇异值理论得到了机构的速度与加速度极值表达式，分析了平台在关节速度限制下的速度特性，以及在关节力矩限制下平台的加速能力。分析结果表明此定位平台运动最大速度最差可达0.8m/s；最大加速度最差可达12g，最好情况下可达14g。实验验证此定位平台具有高加速度的运动特性，可达上述速度与加速度指标。

Abstract

With the quickly development of the IC industry

the positioning table used in the encapsulation installment must possess the characteristics of high and high velocity and high accelerate. It is necessary to study a novel high accelerate and high precision positioning mechanism. Orient to this requirement

a novel precision positioning mechanism is presented. It consists two parallelograms chains

and is drove directly by linear voice motors. Firstly

Largrange equations are used to build the dynamic model of the mechanism. Secondly

based on the singularity value theory

the expressions of velocity extremum and acceleration extremum are obtained. Then the velocity characteritics

and the acceleration ability subject to the limitation of the joint force are analyzed. The analyse results illustrate that the positioning table can get the maximum velocity 0.8m/s at the worst case

the maximum acceleration 12g at the worst case 14g at the best case. Experiments validate that the presented positioning stage can get above performance index and possess the high accelerate characteristics.

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Related Institution

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

University of Chinese Academy of Sciences

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