The application of laser scanning confocal microscope in micro-electro-mechanical system

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The application of laser scanning confocal microscope in micro-electro-mechanical system

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- The application of laser scanning confocal microscope in micro-electro-mechanical system
- Optics and Precision Engineering Vol. 16, Issue 7, Pages: 1241-1246(2008)
- 作者机构：
  
  厦门大学萨本栋微机电研究中心
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：22 October 2007，
  
  Revised：11 December 2007，
  
  Published Online：25 July 2008，
  
  Published：25 July 2008
- 稿件说明：
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曾毅波,蒋书森,黄彩虹,张玉龙,张艳. 激光共聚焦扫描显微镜在微机电系统中的应用[J]. 光学精密工程, 2008,16(7):1241-1246

The application of laser scanning confocal microscope in micro-electro-mechanical system[J]. Optics and precision engineering, 2008, 16(7): 1241-1246.
曾毅波,蒋书森,黄彩虹,张玉龙,张艳. 激光共聚焦扫描显微镜在微机电系统中的应用[J]. 光学精密工程, 2008,16(7):1241-1246 DOI：

The application of laser scanning confocal microscope in micro-electro-mechanical system[J]. Optics and precision engineering, 2008, 16(7): 1241-1246. DOI：

摘要

在微机电系统中，三维微结构分析是对微加工工艺进行表征的一种重要手段。随着微机电系统研究的深入和产业化的需求

其微结构分析在微机电系统中的重要性日益凸现。激光共聚焦扫描显微镜因其高分辨率、非接触、数据结构分析快等优点，在微结构分析中得到了大量的应用。本文介绍激光共聚焦扫描显微镜的成像原理，重点介绍激光共聚焦显微镜在大角度测量和形貌分析中的应用。同时，与台阶仪、扫描电子显微镜和白光干涉仪相比较，指出激光共聚焦扫描显微镜在微结构分析中的优点和局限性。

Abstract

In micro-electro-mechanical system (MEMS)

3D micro structure analysis is becoming a powerful tool for charactering micromachining technique. With the deep research and the need for industrialization of MEMS

the importance of micro structure analysis in MEMS is increasing. Because of the advantages of high resolution

non-contact

and quick data-obtaining

etc.

laser scanning confocal microscope (LSCM) is widely used in micro structure analysis. In the paper the imaging basis of LSCM is introduced

and the measurement of great angle and analysis of profile are especially introduced. Meaning while

the advantages and limits in micro structure analysis by LSCM comparing with stepper

SEM and white light interferometer are pointed out.

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Related Author

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Jie-nan SHEN

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Related Institution

Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen

School of Aerospace Engineering, Xiamen University

School of Physical Science and Technology, Xiamen University

School of Mechanical Engineering, Nanjing University of Science and Technology

Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology

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