Study and improvement on Ablation System in Mass Spectrograph

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Study and improvement on Ablation System in Mass Spectrograph

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- Study and improvement on Ablation System in Mass Spectrograph
- Optics and Precision Engineering Vol. 16, Issue 8, Pages: 1403-1410(2008)
- 作者机构：
  
  天津大学精密仪器与光电子工程学院
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：05 December 2007，
  
  Revised：30 January 2008，
  
  Published Online：25 August 2008，
  
  Published：25 August 2008
- 稿件说明：
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卢慧卿. 质谱熔样系统的研究与改进[J]. 光学精密工程, 2008,16(8):1403-1410

Study and improvement on Ablation System in Mass Spectrograph[J]. Optics and precision engineering, 2008, 16(8): 1403-1410.
卢慧卿. 质谱熔样系统的研究与改进[J]. 光学精密工程, 2008,16(8):1403-1410 DOI：

Study and improvement on Ablation System in Mass Spectrograph[J]. Optics and precision engineering, 2008, 16(8): 1403-1410. DOI：

摘要

质谱熔样系统主要包括两种，激光熔样和石墨炉熔样。熔样系统通常为商品化模块，功能操作和过程控制相对独立，这使其在质谱仪中被集中控制和协调运行的能力受到限制。为了提高质谱仪中熔样系统的熔样精度、效率和自动化程度，以惰性气体同位素质谱仪为实验对象，对熔样系统的智能化进行研究。主要完成对激光熔样系统中二维样品台的重新设计，石墨炉进样系统的自动化设计。设计了一系列控制子程序，并对视觉系统进行了标定。熔样系统的智能化实现为整个质谱系统的智能化改造奠定了基础。

Abstract

The MS melt-like system includs Two types

Laser fusion-like and Melting-like graphite furnace. Laser Ablation System (LAS) is usually commercial module

whose function operation and process control are relatively independent. When used in MS

the LAS is restricted in centralized controll and coordinated operation. To improve the ablation precision

efficiency and automation of the LAS in MS

this subject regarded the Inert Gas Isotope-MS as experimental subject

and made a study on intelligent Laser Ablation System in MS. A two-dimensional sample worktable is redesigned

the Automation of Graphite Furnace Injection System is also Designed.A series of control subroutine are designed

and the vision system is calibrated. The realization of Intelligent Laser Ablation System provide a base for the current intelligent development of MS.

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Related Author

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Related Institution

Institute of Microelectronics， Chinese Academy of Sciences

Changcheng Institute of Metrology & Measurement

Hubei Key Laboratory of Modern Manufacture Quality Engineering， School of Mechanical Engineering， Hubei Wniversity of Technology

Advanced Photonics Center， School of Electronic Science and Engineering， Southeast University

School of Engineering Science， University of Chinese Academy of Sciences

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