Preliminary study of SiC:H surface-modified coatings with end-hall ion source assisted

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Preliminary study of SiC:H surface-modified coatings with end-hall ion source assisted

Article | 更新时间：2020-08-12

- Preliminary study of SiC:H surface-modified coatings with end-hall ion source assisted
- Optics and Precision Engineering Vol. 16, Issue 9, Pages: 1603-1607(2008)
- 作者机构：
  
  长春光学精密机械与物理研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：07 November 2007，
  
  Revised：27 December 2007，
  
  Published Online：25 September 2008，
  
  Published：25 September 2008
- 稿件说明：
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王彤彤,高劲松,王笑夷,陈红,郑宣鸣,范镝,申振峰. 霍尔离子源辅助制备碳化硅改性薄膜的初步研究[J]. 光学精密工程, 2008,16(9):1603-1607

Preliminary study of SiC:H surface-modified coatings with end-hall ion source assisted[J]. Optics and precision engineering, 2008, 16(9): 1603-1607.
王彤彤,高劲松,王笑夷,陈红,郑宣鸣,范镝,申振峰. 霍尔离子源辅助制备碳化硅改性薄膜的初步研究[J]. 光学精密工程, 2008,16(9):1603-1607 DOI：

Preliminary study of SiC:H surface-modified coatings with end-hall ion source assisted[J]. Optics and precision engineering, 2008, 16(9): 1603-1607. DOI：

摘要

应用电子枪蒸发硅，霍尔离子源电离甲烷，并辅助沉积的方法在反应烧结碳化硅（Reaction Bonded Silicon Carbide: RB SiC）基底上沉积了碳化硅（SiC:H）改性薄膜。XRD测试表明制备的碳化硅改性薄膜为α相。通过控制沉积速率，制备了硬度从9.781 GPa-13.087 GPa，弹性模量89.344 GPa-123.413 GPa的碳化硅改性薄膜。比较同样条件下都镀制银膜的抛光良好微晶玻璃和经过精细抛光的改性反应烧结碳化硅，两者有相近的反射率。附着力实验表明制备的薄膜和基底有良好的结合。在温度冲击实验下，制备的薄膜无龟裂和脱落。

Abstract

A new method for RB SiC (Reaction Bonded Silicon Carbide) surface modification is reported in this paper. Silicon is evaporated by E-gun

End-Hall ion source is imposed to ionize methane gas as a reactive gas

and it also assists coating formation to improve optical and mechanical quality

SiC:H coatings for modification are fabricated on RB SiC substrate. XRD (X-ray Diffraction) result shows all prepared coatings under the same condition areαphase. Hardness and elastic modulus are in the range of 9.781 GPa-13.087 GPa and 89.344 GPa-123.413 GPa

respectively. After surface-modification polishing and coating silver

reflectance is close to fine polished Zerodur glass coating with silver. Adhesion tests indicate the fabricated coatings adhere to the substrate firmly. Temperature impact experiments are performed through liquid nitrogen and boiling water for 5 cycles

no fall-off and cracks are observed.

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Related Institution

Center of Femtosecond Laser Manufacturing for Advanced Materials and Devices， State Key Laboratory of Advanced Technology for Materials Synthesis and Processing， Wuhan University of Technology

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School of Materials Science and Engineering， Wuhan University of Technology

International School of Materials Science and Engineering， Wuhan University of Technology

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

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