EUV Monochromator Wavelength Calibration

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EUV Monochromator Wavelength Calibration

Article | 更新时间：2020-08-12

- EUV Monochromator Wavelength Calibration
- Optics and Precision Engineering Vol. 16, Issue 9, Pages: 1660-1672(2008)
- 作者机构：
  
  中科院长春光学精密机械与物理研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：05 June 2008，
  
  Revised：23 July 2008，
  
  Published Online：25 September 2008，
  
  Published：25 September 2008
- 稿件说明：
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董宁宁,陈波. 极紫外（EUV）单色仪波长定标[J]. 光学精密工程, 2008,16(9):1660-1672

EUV Monochromator Wavelength Calibration[J]. Optics and precision engineering, 2008, 16(9): 1660-1672.
董宁宁,陈波. 极紫外（EUV）单色仪波长定标[J]. 光学精密工程, 2008,16(9):1660-1672 DOI：

EUV Monochromator Wavelength Calibration[J]. Optics and precision engineering, 2008, 16(9): 1660-1672. DOI：

摘要

本文给出了一种新的EUV单色仪定标方法：通过测量标准气体He空阴极光源的30.38nm和58.43nm两条发射光谱和标定过的中心波长为13.90nm Mo/Si多层膜反射镜的反射率峰值位置，对Mcpherson247型EUV单色仪进行波长定标，将所定的标准点在单色仪的运动轨迹上作了相应的标识，并用Origin软件进行处理，利用一元二次方程得出拟合曲线。对标定结果作了分析，得出了在1nm～120nm波段内，用激光等离子体光源软X射线反射率计测量多层膜反射镜反射率时，测量准确度为0.08nm，测量重复性为±0.04nm。

Abstract

This paper presents a new calibration method of EUV monochromator

that is

measuring line spectrum of 30.38nm and 58.43nm with the standard He hollow cathode source and the reflectivity peak of calibrated Mo/Si multilayer mirror which center position of wavelength is 13.90nm

then the wavelength of Mcpherson247 are determined

and setting a corresponding sign on the track of the monochromator with each standard point which we just calibrate in this experiment and make a curve with two-order parabolic equation by Origin software. When measuring the reflectivity of multilayer mirror by using a soft X-ray reflectometer with laser-produced plasma source

the analyses of calibration results indicate the accuracy is 0.08nm

and the repeatability is ±0.04nm in 1nm ～120nm wavelength band .

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Related Institution

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Instrument Science and Optoelectronic Engineering, Beijing Information Science and Technology University

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