Optical constants determination of aluminum based on combined optimal algorism

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Optical constants determination of aluminum based on combined optimal algorism

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- Optical constants determination of aluminum based on combined optimal algorism
- Optics and Precision Engineering Vol. 16, Issue 9, Pages: 1582-1588(2008)
- 作者机构：
  
  长春光机所应用光学国家重点实验室
- 作者简介：
- 基金信息：
- DOI：
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- Received：24 February 2008，
  
  Revised：10 March 2008，
  
  Published Online：25 September 2008，
  
  Published：25 September 2008
- 稿件说明：
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金伟华,金春水. 基于混合优化算法的光谱反演法确定铝薄膜光学常数_光学精密工程[J]. 光学精密工程, 2008,16(9):1582-1588

Optical constants determination of aluminum based on combined optimal algorism[J]. Optics and precision engineering, 2008, 16(9): 1582-1588.
金伟华,金春水. 基于混合优化算法的光谱反演法确定铝薄膜光学常数_光学精密工程[J]. 光学精密工程, 2008,16(9):1582-1588 DOI：

Optical constants determination of aluminum based on combined optimal algorism[J]. Optics and precision engineering, 2008, 16(9): 1582-1588. DOI：

摘要

[目的] 提出一种离线精确测定金属铝薄膜光学常数的方法，与传统的原位测量方法相比，不需要连接到真空室的复杂测量设备，方便快捷。[方法] 该方法以测量的椭偏光谱曲线和分光光谱曲线为目标，考虑金属铝薄膜在空气中表面氧化的影响，在混合优化算法的基础上，经过基于色散关系的多波长法拟合确定金属铝薄膜从紫外到可见区（200-800nm）的光学常数；[结果] 优化算法采用多种群并行遗传算法和最小二乘法相结合的方式，提高了拟合质量和速度，得到了理想的结果，光谱曲线拟合误差为0.5%。[结论] 在确定了铝光学常数的基础上，镀制了单腔紫外诱导透射滤光片，测量的透过率光谱与设计结果基本吻合

Abstract

Objective：We propose an ex-situ method to determine the optical constants of aluminum thin films precisely. Comparing to the custom in-situ method

our method doesn’t need the complex optical measurement apparatus attached to vacuum chamber and can be performed simply and fast. Method：Using multi-wavelength fitting method

we fit the ellipsometric and photometric spectra with a combined optimal algorism of genetic and least square. The oxide layer formed on the aluminum in air is included in the fitting process. Result：The optical constants in the UV to visible range are obtained by this method within an error of 0.5%. Conclusion：With these data known

we design and deposit an UV induced transmission filter of one cavity. The tested transmission spectra are well consistent with those designed with a peak transmittance error of 1% at 265nm.

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