Experimental Study on the Dual-Lapping Process with Sapphire Crystal

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Experimental Study on the Dual-Lapping Process with Sapphire Crystal

Article | 更新时间：2020-08-12

- Experimental Study on the Dual-Lapping Process with Sapphire Crystal
- Optics and Precision Engineering Vol. 17, Issue 10, Pages: 2493-2498(2009)
- 作者机构：
  
  机械制造及自动化教育部重点实验室，浙江工业大学2. 浙江工业大学
- 作者简介：
- 基金信息：
- DOI：
  CLC： TG58
- Received：15 July 2008，
  
  Revised：06 December 2008，
  
  Published Online：20 October 2009，
  
  Published：20 October 2009
- 稿件说明：
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文东辉,洪滔,张克华,鲁聪达. 蓝宝石晶体双面研磨加工的实验研究[J]. 光学精密工程, 2009,17(10):2493-2498

Experimental Study on the Dual-Lapping Process with Sapphire Crystal[J]. Optics and precision engineering, 2009, 17(10): 2493-2498.
文东辉,洪滔,张克华,鲁聪达. 蓝宝石晶体双面研磨加工的实验研究[J]. 光学精密工程, 2009,17(10):2493-2498 DOI：

Experimental Study on the Dual-Lapping Process with Sapphire Crystal[J]. Optics and precision engineering, 2009, 17(10): 2493-2498. DOI：

摘要

为了实现对蓝宝石晶体的高效低损伤研磨加工，对蓝宝石晶体的双面研磨加工表面粗糙度、研磨均匀性和亚表面损伤层的深度进行试验研究。采用280#碳化硼磨粒双面研磨(0001)面蓝宝石晶体，首先考察了研磨时间对材料去除速率、表面粗糙度的作用规律，根据蓝宝石晶体切割表面状态确定了双面研磨的加工余量，接着，通过WYKO粗糙度仪从微观上分析了蓝宝石晶体表面的研磨均匀性，最后应用纳米压入测试分析了亚表面损伤层的深度。实验结果表明：蓝宝石晶体经过120分钟的双面研磨加工后可以获得Ra0.523μm，Rt<6.0μm的表面，亚表面损伤层小于1μm。

Abstract

In order to achieve high efficiency and low damaged layer during sapphire crystal lapping process

experimental research on rougness

lapping uniformity and sub-surface damaged layer were studied in this paper. Sapphire with (0001) orientation was lapped by 280 mesh boron carbide abrasive grits

firstly

effects of lapping times on the material remove rate and surface roughness were investigated

then micro-surface uniformity was also presented by using WYKO equipment. Finally

Nano-indentation test was applied to measure the depth of damaged layer according to the hardness or modulus variance. Experimental results show that sapphire crystal with average roughness Ra0.523μm and Rt<6.0μm

depth of sub-surface damaged layer not more than 1μm

could be achieved by dual-lapping abrasive machining with 280 mesh boron carbide grits in 120 minutes.

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Related Author

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WEN Qiuling

WANG Xiaoguang

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Related Institution

Institute of Manufacturing Engineering， Huaqiao University

School of Mechanical and Automotive Engineering， South China University of Technology

Guangdong University of Science and Technology

Institute of Precision Optical Engineering， MOE Key Laboratory of Advanced Micro-Structured Materials， Shanghai Frontiers Science Center of Digital Optics， Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications， School of Physics Science and Engineering， Tongji University

College of Mechanical and Automotive Engineering， South China University of Technology

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