Study on microfabrication technology of multichannel flexible neural microelectrodes

doi:null

您当前的位置：

首页 >

文章列表页 >

Study on microfabrication technology of multichannel flexible neural microelectrodes

Article | 更新时间：2020-08-12

- Study on microfabrication technology of multichannel flexible neural microelectrodes
- Optics and Precision Engineering Vol. 17, Issue 10, Pages: 2465-2472(2009)
- 作者机构：
  
  上海大学理学院2. 上海交通大学生命科学技术学院3. 上海交通大学微纳科学技术研究院4. 中科院上海微系统与信息技术研究所纳米技术研究室5. 上海交通大学激光与光子生物医学研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：29 October 2008，
  
  Revised：08 December 2008，
  
  Published Online：20 October 2009，
  
  Published：20 October 2009
- 稿件说明：
移动端阅览
邢玉梅,惠春,徐爱兰,李刚,赵建龙,任秋实. 多通道柔性神经微电极加工工艺研究[J]. 光学精密工程, 2009,17(10):2465-2472

Study on microfabrication technology of multichannel flexible neural microelectrodes[J]. Optics and precision engineering, 2009, 17(10): 2465-2472.
邢玉梅,惠春,徐爱兰,李刚,赵建龙,任秋实. 多通道柔性神经微电极加工工艺研究[J]. 光学精密工程, 2009,17(10):2465-2472 DOI：

Study on microfabrication technology of multichannel flexible neural microelectrodes[J]. Optics and precision engineering, 2009, 17(10): 2465-2472. DOI：

摘要

目的：设计并制作多通道柔性神经微电极，对微电极的加工工艺进行研究。方法：采用一种新型的柔性聚合物材料——聚对二甲苯（parylene C）作为微电极的基底和绝缘材料，借助微细加工技术，制作柔性神经微电极。结果：利用上述方法制作了36通道（按6×6矩阵排列）的柔性神经微电极，微电极的尺寸分别为150m（圆形）和150m×150m（方形），电极引线线宽为30m。无论微电极为圆形或方形，表面均平整光滑、轮廓清晰。电学性能测试结果表明：1kHz时微电极的阻抗仅为7k左右，且随着频率的增加，阻抗逐渐降低，呈明显高通特性。结论：微电极加工质量较好，电学性能优良。实现了微电极和柔性基底的集成，有利于高效率批量制作。为视觉假体中柔性神经接口的研制奠定基础。

Abstract

Objective: Multichannel flexible neural microelectrodes were designed and fabricated. The fabrication process of microelectrodes was studied. Method: A microfabrication technology was introduced to manufacture flexible microelectrodes based on a new flexible substrate material

parylene C

due to its excellent electrical insulating

mechanical and biocompatible performances. Result: A 36 channel flexible neural microelectrode was fabricated

arranging in a 6×6 square grid pattern. The size of microelectrode was 150m (circular) and 150m×150m (squre)

respectively. The line width of metal traces was 30m. It was found that the surface of microelectrode was smooth and the outline of microelectrode was distinct. The impedance of microelectrode was only 7k or so

and reduced as frequency increasing

showing a high-pass behavior. Conclusion: The microelectrodes and flexible substrate were integrated by the microfabrication technology. Fabricated microelectrodes had nice quality and good electrical property

which was suitable for the application in retinal prostheses.

关键词

Keywords

references

Views

340

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰