In order to obtain micro-structured surface with nano-surface finish

a three-dimensional diamond fly-cutting system is established based on ‘Nanosys-300’ ultra-precision machining system. The effects of spindle speed

feed rate

as well as the depth of cut on the roughness were investigated respectively. The analytical result of theoretic surface roughness (TSR) shown that TSR was constant along the normal direction

while TSR was periodic variety along the feed direction. TSR was reduced with the decreasing of feed rate and nose angle ε of tool or increasing of cutting radius. The experimental results revealed that roughness Ra was reduced with the decreasing feed rate and depth of cut on PC. While it was increased with the decreasing depth of cut or increasing feed rate on LY12. The spindle speed didn’t have a signify impact on Ra for both materials. The roughness of 38nm on LY12 and 43nm on PC were achieved. Micro pyramid array and v-groove array were obtained with a pointed V-shaped single crystal diamond tool on aluminum alloy LY12.