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Accuracy calibration of chip mounter alignment system based on grating
Article | 更新时间:2020-08-12
    • Accuracy calibration of chip mounter alignment system based on grating

    • Optics and Precision Engineering   Vol. 17, Issue 10, Pages: 2425-2430(2009)
    • CLC: TB92
    • Received:14 October 2008

      Revised:13 December 2008

      Published Online:20 October 2009

      Published:20 October 2009

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  • Accuracy calibration of chip mounter alignment system based on grating[J]. Optics and precision engineering, 2009, 17(10): 2425-2430. DOI:

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Related Author

RAN Maoming
GOU Li
DENG Jingyue
FU Min
JIN Chongyu
Cong WANG
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Related Institution

National Key Laboratory of Optical Technology and Instruments, Zhejiang University Group
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