Electrically driving and controlling adaptive 128×128 element liquid crystal micro-lens array with tunable focal length

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Electrically driving and controlling adaptive 128×128 element liquid crystal micro-lens array with tunable focal length

Article | 更新时间：2020-08-12

- Electrically driving and controlling adaptive 128×128 element liquid crystal micro-lens array with tunable focal length
- Optics and Precision Engineering Vol. 17, Issue 10, Pages: 2351-2358(2009)
- 作者机构：
  
  华中科技大学图像识别与人工智能研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP211+.6
- Received：24 November 2008，
  
  Revised：15 December 2008，
  
  Published Online：20 October 2009，
  
  Published：20 October 2009
- 稿件说明：
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李晖,张新宇,张天序,沈绪榜. 电控可变焦128×128元自适应液晶微透镜阵列[J]. 光学精密工程, 2009,17(10):2351-2358

Electrically driving and controlling adaptive 128×128 element liquid crystal micro-lens array with tunable focal length[J]. Optics and precision engineering, 2009, 17(10): 2351-2358.
李晖,张新宇,张天序,沈绪榜. 电控可变焦128×128元自适应液晶微透镜阵列[J]. 光学精密工程, 2009,17(10):2351-2358 DOI：

Electrically driving and controlling adaptive 128×128 element liquid crystal micro-lens array with tunable focal length[J]. Optics and precision engineering, 2009, 17(10): 2351-2358. DOI：

摘要

借鉴已有的单圆孔电极液晶透镜的结构与设计方法，发展得到了新型的电控可变焦128×128元的液晶微透镜阵列。该面阵液晶微透镜使用ITO玻璃作为上下基板，其中上基板电极是将ITO膜通过光刻技术和盐酸腐蚀方法得到了128×128元圆孔阵列图案；而下电极基板就是ITO膜。上基板电极的圆孔阵列整齐的排列，每个圆孔的直径为50μm，圆孔之间的间隔为100μm。夹在上下基板之间的液晶层的厚度为20μm。该面阵液晶微透镜的特性为：在0.2VRMS～5.0 VRMS电压范围下，该面阵液晶微透镜的焦距范围为50μm～400μm。进一步的测试实验结果表明，该面阵液晶微透镜的点扩展函数近似于理论数值，并且该面阵液晶微透镜的工作电压与焦距是成反比例关系，以及该面阵液晶微透镜具有与传统制作的面阵微透镜一样的多重像成像效果。

Abstract

A new liquid crystal (LC) micro-lens array is proposed based on structure and design methods of the single circular hole electrode LC lens with 128×128 elements. The LC micro-lens array is an electrically driving and controlling micro-lens array with tunable focal length. And the Indium Tin Oxides (ITO) glasses are used as the top and bottom substrates of the LC micro-lens array. The top electrode patterns are got by the methods of lithography and hydrochloric acid etching. The top electrode patterns have 128×128 elements. Every element is a single circular hole of 50μm diameter. The distance between circular holes is 100μm. The bottom electrode is just ITO film. And the thickness of LC layer between the top and bottom electrode is about 20μm. The focal length of the LC micro-lens array can be electric tunable from 50μm to 400μm under operating voltage from 0.2 VRMS to 5.0 VRMS. The result of the test shows that the point spread function of the LC micro-lens array is close to the theory values. And the relationship of operating voltage and focal length is inverse proportion. The imaging characteristic of the LC micro-lens array is like the imaging characteristic of conventional optical micro-lens array.

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