Design of two-dimensional fast-steering cooling mirror equipment

SHAO Shuai; GAO Yun-guo; GUO Jin; XUAN Ming

doi:null

您当前的位置：

首页 >

文章列表页 >

Design of two-dimensional fast-steering cooling mirror equipment

Article | 更新时间：2020-08-12

- Design of two-dimensional fast-steering cooling mirror equipment
- Optics and Precision Engineering Vol. 17, Issue 3, Pages: 493-498(2009)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH703;TN243
- Received：25 June 2008，
  
  Revised：28 July 2008，
  
  Published Online：25 March 2009，
  
  Published：25 March 2009
- 稿件说明：
移动端阅览
邵帅, 高云国, 郭劲, 宣明. 二维快速控制水冷反射镜装置设计[J]. 光学精密工程, 2009,17(3): 493-498

SHAO Shuai, GAO Yun-guo, GUO Jin, XUAN Ming. Design of two-dimensional fast-steering cooling mirror equipment[J]. Editorial Office of Optics and Precision Engineering, 2009,17(3): 493-498
邵帅, 高云国, 郭劲, 宣明. 二维快速控制水冷反射镜装置设计[J]. 光学精密工程, 2009,17(3): 493-498 DOI：

SHAO Shuai, GAO Yun-guo, GUO Jin, XUAN Ming. Design of two-dimensional fast-steering cooling mirror equipment[J]. Editorial Office of Optics and Precision Engineering, 2009,17(3): 493-498 DOI：

摘要

为了进一步精确控制激光发射方向

减少反射镜热畸变以提高光束质量

设计了一种新型二维快速控制水冷反射镜装置。根据高功率激光反射镜的设计和制作原则

对反射镜的材料性能进行了分析

采用主动水冷铜镜来减小镜面热畸变使镜面变形控制在0.1 m以内。然后

分别从机械结构、驱动器和控制系统、角度检测元件3方面设计了反射镜装置

其

x-y

轴框架式的机械结构形式

可减小反射镜的冷却水管对轴系回转精度的影响

使回转精度＜2。实验测试结果表明

二维快速控制水冷反射镜装置工作稳定、可靠

控制光束稳定的精度＜1

可满足对激光传输方向的精确实时控制和对光束整体倾斜方向进行校正等要求。

Abstract

A mechanical structure for two-dimensional fast-steering active cooling mirror was designed to control precisely the transmission direction of laser emitting and to reduce the mirror thermal distortion to improve laser beam quality. Based on the design and fabrication principles for the high power laser reflector

an active cooling mirror was adopted to improve the beam quality by reducing the mirror thermal distortion which can control the mirror distortion less than 0.1 m. Then

an equipment was designed from three aspects in the framework

driver

controlling system and the angle measurement element. By using a

x-y

axis framework structure

the effect of the cooling water tube for mirror on axis system could be reduced and rotation precision of the axis system was less than 2. The test result was analyzed and it is shown that the mechanical structure works stably and reliably

stabilization precision is less than 1

which can satisfy the system requirements of stabilization

higher precision and rapid speed for controlling and correcting accurately the transmission direction of the beam

and can be applied widely to the high power laser system.

关键词

Keywords

references

HIGGS J C. Overview of the ABL-firepond active-tracking and compensation facility[J].SPIE,1998,3381:14-18.[2] BILLMAN K W, BREAKWELL J A, DUTTA K, et al.. ABL beam control laboratory demonstrator[J]. SPIE,1999,3706:172-179.[3] BILLMAN K W, HORWITZ B A. Airborne laser system common path/common mode design approach. [J]. SPIE,1999,3706:196-203.[4] 吴冬良,戴一帆,王贵林,等. 光学面形误差对环围能量比的影响[J]. 光学精密工程,2008,15(9):1328-1335. WU D L, DAI Y F, WANG G L, et al.. Influence of optical surface error on encircled energy [J]. Opt. Precision Eng., 2008,15(9):1328-1335. (in Chinese)[5] PAUL R, YODER J. 光机系统设计[M] . 北京:机械工业出版社,2008. PAUL R, YODER J. Opto-Mechanical Systems Design [M]. Beijing: China Machine Press ,2008.(in Chinese)[6] 程祖海,张耀宁,杜泽晴,等. 回流式水冷超薄多层镜的研究[J]. 强激光与粒子束,1997,9(3):418-422. CHENG Z H, ZHANG Y N, DU Z Q, et al.. A study of the thin and multilayer mirror with circular coolant channel [J].High Power Laser and Particle Beams,1997,9(3):418-422. (in Chinese)[7] 傅承毓,姜凌涛,任戈,等. 快速反射镜成像跟踪系统 . 光电工程,1994,21(3):1-8. FU CH Y, JIANG L T, REN G, et al.. Imaging, tracking systems of the fast-steering mirror [J].Opto-Electronic Engineering, 1994,21(3):1-8. (in Chinese)[8] 张丽敏,郭劲, 陈娟. 快速反射镜机械结构研究综述[J]. 光机电信息,2005(3):21-24. ZHANG L M,GUO J,CHEN J. Summary of the mechanic structure for fast-steering mirrors [J].Ome Information,2005(3):21-24. (in Chinese)[9] 高亮,阚珊珊,李敏,等. 压电陶瓷精密转动平台的转角精度测量[J]. 光学精密工程,2007,15(2):206-211. GAO L, KAN SH SH,LI M, et al.. Rotation-angle-accuracy measurement of piezo tilt platform[J].Opt. Precision Eng.,2007,15(2):206-211. (in Chinese)[10] 刘万里,王占奎,曲兴华,等. 激光跟踪测量系统跟踪转镜的误差分析[J]. 光学精密工程,2008,16(4):585-590. LIU W L, WANG ZH K, QU X H, et al.. Error analysis of tracking mirror for laser tracker system[J].Opt. PrecisionEng., 2008,16(4):585-590.(in Chinese)[11] 吴琼雁,王强,彭起,等. 音圈电机驱动的快速控制反射镜高带宽控制[J]. 光电工程,2004,31(8):15-18. WU Q Y,WANG Q,PENG Q, et al.. Wide bandwidth control of fast-steering mirror driven by voice coil motor [J]. Opto-Electronic Engineering,2004,31(8):15-18.(in Chinese)

Views

465

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

High-stroke XY precision positioning stage based on Zigzag flexure hinge

Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control

Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform

Structural design and bandwidth characteristic of a fast steering mirror with large travel range

Stiffness optimization of two-axis flexible supporting platform for fast steering mirror

Related Author

CHEN Liguo

SHEN Hao

XUE Liwei

LING Mingxiang

ZHAO Linfeng

ZHU Limin

LI Pengzhi

LAI Leijie

Related Institution

School of Mechanical and Electrical Engineering， Soochow University

State Key Laboratory of Mechanical System and Vibration， School of Mechanical Engineering， Shanghai Jiao Tong University

Changchun Institute of Optic， Fine Mechanics and Physics， Chinese Academy of Sciences

School of Computing and Engineering， University of Gloucestershire， Cheltenham

School of Mechanical and Automotive Engineering， Shanghai University of Engineering Science

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰