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Design of Distributed Micro-area Micro/Nano-imprinting Lithography System
Article | 更新时间：2020-08-12

    • Design of Distributed Micro-area Micro/Nano-imprinting Lithography System

    • Optics and Precision Engineering   Vol. 17, Issue 4, Pages: 807-812(2009)
    • CLC： TN205TN29

    • Received：18 July 2008，

      Revised：19 August 2008，

      Published Online：25 April 2009，

      Published：25 April 2009

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  • Design of Distributed Micro-area Micro/Nano-imprinting Lithography System[J]. Optics and precision engineering, 2009, 17(4): 807-812. DOI：

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