Capacitive pressure sensor with circular island structure

ZOU Li-ming; GUO Hang

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Capacitive pressure sensor with circular island structure

Article | 更新时间：2020-08-12

- Capacitive pressure sensor with circular island structure
- Optics and Precision Engineering Vol. 17, Issue 6, Pages: 1385-1390(2009)
- 作者机构：
  
  厦门大学萨本栋微机电研究中心,福建厦门,361005
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP212.12
- Received：20 January 2009，
  
  Revised：30 April 2009，
  
  Published Online：20 June 2009，
  
  Published：20 June 2009
- 稿件说明：
移动端阅览
邹黎明,郭航. 采用环形岛棱结构的电容式压力传感器[J]. 光学精密工程, 2009,17(6):1385-1390

ZOU Li-ming, GUO Hang. Capacitive pressure sensor with circular island structure[J]. Optics and precision engineering, 2009, 17(6): 1385-1390.
邹黎明,郭航. 采用环形岛棱结构的电容式压力传感器[J]. 光学精密工程, 2009,17(6):1385-1390 DOI：

ZOU Li-ming, GUO Hang. Capacitive pressure sensor with circular island structure[J]. Optics and precision engineering, 2009, 17(6): 1385-1390. DOI：

摘要

改变传感器可动极板的结构是解决MEMS电容式压力传感器信号输出与压力输入呈非线性关系问题的方法之一。设计了一种新型结构电容式压力传感器

其可动极板是LPCVD氮化硅构成的一个方形薄膜

薄膜中心到边缘之间由PECVD氧化硅构筑一个环形岛棱

使可动极板在压力负载下的变形趋于平整

减小了边缘杂散电容带来的非线性

从而改善了该传感器的输出特性。利用有限元方法分析了不同尺寸的动极板在不同外加压力作用下压力与形变的关系

以及相应的应力分布情况

并采用最小二乘拟合直线法计算了压力传感器的线性度。分析结果表明

与常规的双极板微型电容式压力传感器相比

新型结构压力传感器的线性度改善了48.38%

达到了1.6％。

Abstract

A capacitive pressure sensor with a new movable electric plate structure is presented to improve the output nonlinearity of a MEMS-based capacitive pressure sensor. The movable plate of the sensor is a rectangular memrance made of LPCVD silicon nitride film

and a circular island is added from the center to the edge of the membrane by depositing and patterning a layer of PECVD silicon dioxide. With this structure

the deformation of the movable plate of the capacitive pressure sensor will tend to flat when applying a load of pressure

so that the nonlinearity of stray capacitance near the edge of the entire structure is decreased and the output properties of the sensor is improved. Moreover

the Finite Element Model( FEM) in ANSYS is used to analyze the new structure of the movable electrical plate with different dimensions to obtain the relationship between deflection and pressure and the corresponding stress distribution and a curve fitting based on the least-square method is applied to calculate the output linearity of the sensor. Comparison of the MEMS-based capacitive pressure sensor with a general structure sensor

the output linearity of the proposed sensor has been improved by 48.38%

reaching 1.6%.

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Related Institution

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