A novel electronics cooling system—ion drag Electrohydrodynamic (EHD) micropump was introduced. The ion drag EHD micropump containing a planar electrode array on a silicon substrate was fabricated and tested

in which the electrodes were paired as an emitter and a collector with 40 μm width and 50 μm gap between them

the number of electrode pairs was 90 and the gap between two electrode pairs was 100 μm. Static pressure tests were performed by a DC driving voltage and by HFE7100 and ethyl alcohol as working fluids. Experimental results show that the static pressure is quadratic proportion to the input voltage and inverse proportion to the channel height and the maximum pressure head achieved by this micropump is 250 Pa at an applied voltage of 200 V. These data proves that the performance of the ion-drag pump can be improved significantly by selecting the fluid with high permittivity and low viscosity. It also indicates that the cleanness degree of devices and the purification of the working fluid will greatly influence the performance and working lifetime of the EHD micropump.