Chemical mechanical polishing for silicon wafer by composite abrasive slurry

XU Xue-feng; MA Bing-xun; HUANG Yi-shen; PENG Wei

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Chemical mechanical polishing for silicon wafer by composite abrasive slurry

Article | 更新时间：2020-08-12

- Chemical mechanical polishing for silicon wafer by composite abrasive slurry
- Optics and Precision Engineering Vol. 17, Issue 7, Pages: 1587-1593(2009)
- 作者机构：
  
  浙江工业大学机械制造及自动化教育部重点实验室,浙江杭州,310032
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN305.2
- Received：05 August 2008，
  
  Revised：27 September 2008，
  
  Published Online：25 July 2009，
  
  Published：25 July 2009
- 稿件说明：
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许雪峰, 马冰迅, 黄亦申, 彭伟. 利用复合磨粒抛光液的硅片化学机械抛光[J]. 光学精密工程, 2009,17(7): 1587-1593

XU Xue-feng, MA Bing-xun, HUANG Yi-shen, PENG Wei. Chemical mechanical polishing for silicon wafer by composite abrasive slurry[J]. Editorial Office of Optics and Precision Engineering, 2009,17(7): 1587-1593
许雪峰, 马冰迅, 黄亦申, 彭伟. 利用复合磨粒抛光液的硅片化学机械抛光[J]. 光学精密工程, 2009,17(7): 1587-1593 DOI：

XU Xue-feng, MA Bing-xun, HUANG Yi-shen, PENG Wei. Chemical mechanical polishing for silicon wafer by composite abrasive slurry[J]. Editorial Office of Optics and Precision Engineering, 2009,17(7): 1587-1593 DOI：

摘要

为了提高硅片的抛光速率

利用复合磨粒抛光液对硅片进行化学机械抛光。分析了SiO

磨粒与聚苯乙烯粒子在溶液中的

电位及粒子间的相互作用机制

观察到SiO

磨粒吸附在聚苯乙烯及某种氨基树脂粒子表面的现象。通过向单一磨粒抛光液中加入聚合物粒子的方法获得了复合磨粒抛光液。对硅片传统化学机械抛光与利用复合磨粒抛光液的化学机械抛光进行了抛光性能研究

提出了利用复合磨粒抛光液的化学机械抛光技术的材料去除机理

并分析了抛光工艺参数对抛光速率的影响。实验结果显示

利用单一SiO

磨料抛光液对硅片进行抛光的抛光速率为180 nm/min;利用SiO

磨料与聚苯乙烯粒子或某氨基树脂粒子形成的复合磨粒抛光液对硅片进行抛光的抛光速率分别为273 nm/min和324 nm/min。结果表明

利用复合磨粒抛光液对硅片进行抛光提高了抛光速率

并可获得

为

0.2 nm

的光滑表面。

Abstract

In order to increase the polishing rate for a silicon wafer

the composite abrasive slurry was used in Chemical Mechanical Polishing(CMP). Zeta potentials of silica abrasives and polystyrene particles in the slurry were measured at various pH values

and the mechanism of interactions between silica abrasives and polymer particles was analyzed. Small silica abrasives were observed to attach onto the surfaces of the polystyrene particles and some resin particles.Then

the composite abrasive slurry was obtained by adding some polymer particles into single abrasive slurry. In comparison with the polishing performance of traditional CMP and CMP using composite abrasive slurry

the mechanism of material removal of CMP using composite abrasive slurry was proposed

and the influence of craft parameters on the polishing rate was studied through the experiments. Experimental results indicate that the polishing rate is 180 nm/min with single silica abrasive slurry

and 273 nm/min

324 nm/min with the silica abrasive/polystyrene particle composite slurry and silica abrasive/ resin particle composite slurry respectively. These data show that the removal rate with composite abrasive slurry is improved significantly and the wafer surface roughness

is 0.2 nm.

关键词

Keywords

references

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