Hot film sensors array with nickel as sensing material fabricated on a flexible substrate has been developed

which is flexible and can be attached upon curved surface

such as airfoil’ surface

for rapid distribution measurement of temperature or flow parameters with minimal invasion. The influence of magnetron sputtering and heat treatment parameters

including argon pressure

substrate temperature

sputtering power

and annealing temperature

on sensor’s temperature coefficient of resistance (TCR) has been studied for first time. Finally

high TCR of 4640ppm/℃ with good linearity has been obtained.