Mode matching and high quality factor (Q) are the keys to improve the performance of micro-machined vibrating ring gyroscope. In order to achieve high performance

a novel electromagnetic vibrating ring gyroscope was designed and fabricated

in which the centrosymmetric and enantiomorphous structure consisting of a ring and eight symmetric support springs was adopted to match the resonant frequencies of drive mode and sense mode. The theoretical models for the sensitivity and the mechanical noises of the gyroscope were deduced

moreover the effects of gyroscope parameters to the sensitivity and resolution were analyzed. Through the standard bulk MEMS processes

the gyroscope samples were fabricated with (100) silicon. All the processes are easy to achieve without bonding. Experiments show that the frequency split between the drive and sense modes is smaller than 0.5Hz

and the quality factor is about 500 in atmosphere and 14000 in vacuum with 1Pa. PLA (Phase Locked Amplifier) tests show that the resolution of the gyroscope is 0.05o/s and the sensitivity is 0.2uv/ o/s over a range of -200 ~200 o/s.