Experiment system of 400mm thin-mirror active optics

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Experiment system of 400mm thin-mirror active optics

Article | 更新时间：2020-08-12

- Experiment system of 400mm thin-mirror active optics
- Optics and Precision Engineering Vol. 17, Issue 9, Pages: 2076-2083(2009)
- 作者机构：
  
  中科院长春光机所2. 中国科学院长春光机所3. 中国科学院长春光学精密机械与物理研究所4. 长春光学精密机械与物理研究所5. 中科院长春光学精密机械与物理研究所光电对抗部6. 中国科学院长春光学精密机械与物理研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：06 October 2008，
  
  Revised：06 November 2008，
  
  Published Online：25 September 2009，
  
  Published：25 September 2009
- 稿件说明：
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李宏壮,林旭东,刘欣悦,王富国,杨飞,张丽敏,王建立,韩昌元. 400mm薄镜面主动光学试验系统[J]. 光学精密工程, 2009,17(9):2076-2083

Experiment system of 400mm thin-mirror active optics[J]. Optics and precision engineering, 2009, 17(9): 2076-2083.
李宏壮,林旭东,刘欣悦,王富国,杨飞,张丽敏,王建立,韩昌元. 400mm薄镜面主动光学试验系统[J]. 光学精密工程, 2009,17(9):2076-2083 DOI：

Experiment system of 400mm thin-mirror active optics[J]. Optics and precision engineering, 2009, 17(9): 2076-2083. DOI：

摘要

采用400mm口径，12mm厚的球面反射镜进行了主动光学实验，通过背部12个主动支撑点校正面形，实验中通过干涉仪测试镜面面形，采用阻尼最小二乘法计算各支撑点的校正力。通过校正，将初始状态的1.22波长RMS的面形误差校正到0.12波长RMS，接近了镜面加工的0.1波长RMS面形精度，说明所采用的主动校正过程是正确可行。

Abstract

Active optics experiment is carried out with a 400mm diameter

12mm thickness spherical mirror

the mirror surface was corrected by the 12 axial active support. In the experiment

the mirror surface was tested by interferometer

and the damp least square method is used to determine the active corrective force. The initial surface error is 1.22 wavelength RMS

after correction

the surface error is 0.12wavelength RMS，near the error after the mirror polishing 0.1wavelength RMS. The experiment shows the active correct procedure is correct and feasible.

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