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The test design of shape controlled with single electrode Electrostatic about the membrane mirror
Article | 更新时间:2020-08-12
    • The test design of shape controlled with single electrode Electrostatic about the membrane mirror

    • Optics and Precision Engineering   Vol. 17, Issue 8, Pages: 1964-1970(2009)
    • CLC: TH704
    • Received:19 January 2009

      Revised:29 April 2009

      Published Online:20 August 2009

      Published:20 August 2009

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  • The test design of shape controlled with single electrode Electrostatic about the membrane mirror[J]. Optics and precision engineering, 2009, 17(8): 1964-1970. DOI:

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