Hybrid-type MEMS microgripper

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Hybrid-type MEMS microgripper

Article | 更新时间：2020-08-12

- Hybrid-type MEMS microgripper
- Optics and Precision Engineering Vol. 17, Issue 8, Pages: 1928-1934(2009)
- 作者机构：
  
  哈尔滨工业大学机器人研究所2. 哈尔滨工业大学机器人研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：19 January 2009，
  
  Revised：02 March 2009，
  
  Published Online：20 August 2009，
  
  Published：20 August 2009
- 稿件说明：
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陈立国,刘柏旭,陈涛,孙立宁,邵兵. 复合式MEMS微夹持器研制[J]. 光学精密工程, 2009,17(8):1928-1934

Hybrid-type MEMS microgripper[J]. Optics and precision engineering, 2009, 17(8): 1928-1934.
陈立国,刘柏旭,陈涛,孙立宁,邵兵. 复合式MEMS微夹持器研制[J]. 光学精密工程, 2009,17(8):1928-1934 DOI：

Hybrid-type MEMS microgripper[J]. Optics and precision engineering, 2009, 17(8): 1928-1934. DOI：

摘要

研制了一种针对亚毫米微小构件实施稳定夹取及可靠释放的微夹持器，应用MEMS体硅工艺将静电梳齿驱动与真空驱动集成构成复合式驱动，设计了微夹持器静电驱动控制系统以及真空控制系统。在80V的驱动电压下，微夹持器末端夹爪位移25μm。设计了两种尺寸的微夹持器，一种张合量为100m～150m，另一种为150m～200m。针对100～200m的小球进行了微操作实验，实验结果证明静电梳齿驱动结合真空吸附能够使夹取操作更加稳定，基于闭环控制的正压气流能有效克服小球与夹爪之间的粘附力，实现了可靠的释放操作。

Abstract

This work is focused on design and fabrication of a hybrid-type electrostatic silicon microgripper integrated vacuum tool. Vacuum tools are integrated in this novel microgripper in order to improve its pick and place capability. Bulk micromachining technology is employed to fabricate the microgripper from single crystal silicon wafer. The gas circuit controlling and electrical subsystems are designed for the microgripper controlling. At a driving voltage of 80V

a deflection of 25μm at the arm tip of the gripper is achieved. Two different dimensions of the grippers are designed. One gripper is able to pick and place objects of a size ranging from 100μm to 150μm and the other is able to operate objects ranging from 150μm to 200μm.The objects ranging from 100μm to 200μm are picked and placed successfully in the experiment

the experiment indicate that this microgripper can realize the steady manipulation.

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Yudie JIA

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Liwei XUE

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孙立宁

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Related Institution

School of Mechanical and Electrical Engineering， Soochow University

Hypervelocity Aerodynamics Institute， China Aerodynamics Research and Development Center

哈尔滨工业大学机器人研究所2. 哈尔滨工业大学机器人研究所3. 中国科学院上海微系统与信息技术研究所

State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University

Robotic Institute, Harbin Institute of Technology, Harbin 150001,China

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