Design of a four-arm MEMS microgripper integrated with force sensor

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Design of a four-arm MEMS microgripper integrated with force sensor

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- Design of a four-arm MEMS microgripper integrated with force sensor
- Optics and Precision Engineering Vol. 17, Issue 8, Pages: 1878-1883(2009)
- 作者机构：
  
  哈尔滨工业大学机器人研究所2. 哈尔滨工业大学机器人研究所3. 中国科学院上海微系统与信息技术研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN305
- Received：28 August 2008，
  
  Revised：26 October 2008，
  
  Published Online：20 August 2009，
  
  Published：20 August 2009
- 稿件说明：
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陈涛,孙立宁,李欣昕. 具有力感知功能的四臂式MEMS微夹持器研制[J]. 光学精密工程, 2009,17(8):1878-1883

Design of a four-arm MEMS microgripper integrated with force sensor[J]. Optics and precision engineering, 2009, 17(8): 1878-1883.
陈涛,孙立宁,李欣昕. 具有力感知功能的四臂式MEMS微夹持器研制[J]. 光学精密工程, 2009,17(8):1878-1883 DOI：

Design of a four-arm MEMS microgripper integrated with force sensor[J]. Optics and precision engineering, 2009, 17(8): 1878-1883. DOI：

摘要

为了解决夹持器小型集成化、夹持力可控的问题，本文采用体硅加工技术成功的研制了一种基于单晶硅的、具有微力检测功能的新型四臂式MEMS微夹持器。以压阻检测技术为基础，利用MEMS侧面压阻刻蚀工艺将力传感器集成在微夹持器的夹持臂末端，实现夹持力的微力检测。采用有限元软件对微夹持器机构和传感器弹性体进行分析。S型柔性梁结构的设计将梳齿驱动的直线运动转化为夹持臂末段的转动，结合四臂式的末段结构，有效的扩展了夹持器的夹持范围。利用硅玻璃键合技术实现夹持臂的电隔离，通过施加80V电压，夹持臂的单臂运动范围为25靘，夹持器的夹持范围30-130靘。实验标定出传感器的最大量程在1mN以上，分辨率为3霳，可以实现夹持力的有效反馈。

Abstract

In order to realize the monolithically fabrication and control the gripping force

a novel four-arm structure single crystal silicon MEMS gripper integrated with force sensor is successfully developed using silicon bulk machining. Based on the technology of the piezoresistive detection

an effective technique of fabricating vertical sidewall piezoresistor in plane is used to fabricate the piezoresistor in the end of the end-effectors. Finite element analysis (FEA) is used to analyze the structure of the gripper and the flexible beams of the force sensors. The comb microactuator generates a linear horizontal motion

which is converted into rotational motion by an S-type flexible beam system to realize the gripping motion. Combined with the four-arm structure

the manipulating range is expanded. The bonding of the silicon and glass is used to realize the electrical isolation of the gripping arms. At the voltage of 80V

a deflection of the arm tip is 25靘 and the range of the operation is 30m-130靘. Testing results show that the maximum measurement range of the piezoresistive sensors is better than 1mN and the resolution is better than 3霳

which can be used effectively in the force feedback.

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邵兵

孙立宁

陈涛

Related Institution

School of Mechanical and Electrical Engineering， Soochow University

Hypervelocity Aerodynamics Institute， China Aerodynamics Research and Development Center

哈尔滨工业大学机器人研究所2. 哈尔滨工业大学机器人研究所

State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University

Robotic Institute, Harbin Institute of Technology, Harbin 150001,China

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