Measurement of super-smooth surface by grazing X-ray scattering method

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Measurement of super-smooth surface by grazing X-ray scattering method

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- Measurement of super-smooth surface by grazing X-ray scattering method
- Optics and Precision Engineering Vol. 18, Issue 1, Pages: 60-68(2010)
- 作者机构：
  
  中科院长春光学、精密机械与物理研究所2. 中科院长春光学精密机械与物理研究所3. 长春光学精密机械与物理研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC： O433.4;O434.19
- Received：04 June 2009，
  
  Revised：26 July 2009，
  
  Published Online：22 January 2010，
  
  Published：22 January 2010
- 稿件说明：
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王永刚,孟艳丽,马文生,陈斌,陈波. 掠入射X射线散射法测量超光滑表面[J]. 光学精密工程, 2010,18(1):60-68

Measurement of super-smooth surface by grazing X-ray scattering method[J]. Optics and precision engineering, 2010, 18(1): 60-68.
王永刚,孟艳丽,马文生,陈斌,陈波. 掠入射X射线散射法测量超光滑表面[J]. 光学精密工程, 2010,18(1):60-68 DOI：

Measurement of super-smooth surface by grazing X-ray scattering method[J]. Optics and precision engineering, 2010, 18(1): 60-68. DOI：

摘要

介绍了掠入射X射线散射法(GXRS)测量超光滑表面的原理及商业用X射线衍射仪改造而成的实验装置。选择微晶玻璃、蓝宝石以及三片不同粗糙度的硅片作为实验样品。根据一级矢量微扰理论对各个样品所测量的散射分布进行处理。结果表明：GXRS法得到的样品功率谱密度函数(PSD)与使用原子力显微镜(AFM)所测量的结果基本相符。分析了探测器接收狭缝的宽度和入射光发散度对实验结果的影响。分析结果表明：当其他实验条件理想的情况下，探测器接收狭缝宽度小于0.02mm和入射光发散度小于43"时，在空间频率大于0.03μm-1的范围内，由其引起的PSD函数测量误差都小于2%。随着探测器接收狭缝宽度和入射光发散度的减小，测量误差呈指数迅速减小。在所测量的空间频率范围内，PSD函数的误差随频率的增加而减小。

Abstract

The paper introduces the principle of measurement of super-smooth surface by grazing X-ray scattering method and the experimental facility based on an improved X-ray diffraction. The scattering diagrams measured on ZERODUR

Sapphire and three wafers with different roughness are treated by first-order vector perturbation theory. The results indicate that the calculated PSD all are in a good agreement with the results obtained from Atomic force microscope (AFM). We also analyze the effects of the slit width of detector and the divergence of incidence X-ray. With other idea experimental conditions

when slit width of 0.02mm and 43" incidence divergence

errors are both lower than 2% while the range of spatial frequency is higher than 0.03μm-1. We could conclude that the error decrease quickly as reducing the slit width and incidence divergence. The PSD error also decreases quickly as increasing the spatial frequency.

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