Abstract: In order to further correct the optical proximity effect in laser direct writing

the Iterative Error-Correction Method proposed by Rajesh Menon is improved from two aspects. On the one hand

one virtual acoustooptic modulator with high resolution is used to correct the direct writing pattern

and then the exposure data obtained is converted and rounded to that corresponding to the low resolution acoustooptic modulator to avoid the degradation during correction. On the other hand

the exposure dose of writing spots nearest to each error area barycenter is modulated by performing serial global optimization with the minimum whole pattern error as a yardstick

which avoids failure to correct the optical proximity effect when the number of positive errors is equal to that of negative errors. Numerical simulation results indicate that

by the improved Iterative Error-Correction Method

the optical proximity effect of pattern with low resolution acoustooptic modulator can be preferably corrected

and that with high resolution acoustooptic modulator can be further corrected. Subsequently

the resolution of laser direct writing is enhanced.