Various piezoresistive micro-force sensors were developed for a demand on perception and measurement in the field of MEMS. Doped semiconductor silicon material is commonly used in piezoresistive micro-force sensor production. SU-8 cantilever integrated metal piezoresistive achieves very high force sensitivity coefficient due to low elastic modulus. We designed a new type of SU-8 cantilever micro-force sensor integrated serpent-shaped copper piezoresistive structure and samples with double cantilever were fabricated by a kind of novel processing. Experimental results show that SU-8 micro-force sensor has good linearity ranged from 0 to 350 μN with a sensitivity of 0.24 mV/μN and error of 4.06%. It can satisfy micro force detection

and compared to silicon micro-force sensor

SU-8 micro-force sensor has simpler production process and shorter cycle. Besides

SU-8 is winning for its prominent biological compatibility leading to a more extensive application prospect in biomedical research.