High performance Micro-machined Resonant Pressure Sensor

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High performance Micro-machined Resonant Pressure Sensor

Micro/nano technoloy and fine mechanics | 更新时间：2020-08-12

- High performance Micro-machined Resonant Pressure Sensor
- Optics and Precision Engineering Vol. 19, Issue 12, (2011)
- 作者机构：
  
  中国科学院电子学研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：12 April 2011，
  
  Revised：23 May 2011，
  
  Published Online：06 December 2011，
  
  Published：26 December 2011
- 稿件说明：
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李玉欣. 高性能谐振式微机械压力传感器[J]. 光学精密工程, 2011, 19(12): 0-0.

LI Yu-Xin. High performance Micro-machined Resonant Pressure Sensor[J]. Editorial Office of Optics and Precision Engineering, 2011, 19(12): 0-0.
李玉欣. 高性能谐振式微机械压力传感器[J]. 光学精密工程, 2011, 19(12): 0-0. DOI：

LI Yu-Xin. High performance Micro-machined Resonant Pressure Sensor[J]. Editorial Office of Optics and Precision Engineering, 2011, 19(12): 0-0. DOI：

摘要

为了提高压力传感器的精度和抑制温漂

提出了一种采用“H”型双端固支梁、电磁激励、差分检测的微机械谐振式压力传感器。首先，通过FEM分析模拟仿真优化传感器的机械参数，得到较高的灵敏度和分辨率。然后，基于浓硼扩散自停止腐蚀原理，采用了MEMS体硅标准工艺加工出一致性较好的传感器的成品。最后，采用非光敏BCB在真空高温高压的条件下将硅片与谐振器黏和键合(Adhesive Bonding)的方法完成了传感器的真空封装

并设计了应力隔离的后封装方法以降低温漂。实验结果表明:传感器的检测范围为0~120kPa；满量程非线性度低于0.02%；准确度达到0.05% FS；加入应力隔离后的-40℃~70℃的温度漂移不高于0.05%/℃。该传感器能够实现大量程高精度的压力测量

有效的抑制了温漂，具有较高的性能指标。

Abstract

In order to increase accuracy and reduce temperature drift

a micro-machined resonant pressure sensor based on electromagnetically driven H-type doubly-clamped lateral beams and differential detection is proposed in this paper. First

FEM analysis was carried out to guarantee the sensitivity and resolution of the sensor. Then based on the boron-diffusion self-stopped etch technique

the sensor samples were achieved by standard bulk MEMS process

which were of good uniformity. Finally

the vacuum package of the sensor was accomplished by adhesive bonding using non-photosensitive BCB (DVS-BCB-3022-46) and stress isolation. Experimental results indicate that the nonlinearity is lower than 0.02% in the range of 0~120kPa，with the accuracy 0.05% FS

and the temperature drift is less than 0.05%/℃ in the range of -40℃ to 70℃.

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H type micro-machined resonant pressure sensor based on self-stopped etch technique

Related Author

LI Yu-xin

CHEN De-yong

WANG Jun-bo

JIAO Hai-long

LUO Zhen-yu

Related Institution

State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences

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