A new filtering method of improving quality of grating Moiré fringe

Hong-Sheng WU

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A new filtering method of improving quality of grating Moiré fringe

Information sciences | 更新时间：2020-08-12

- A new filtering method of improving quality of grating Moiré fringe
- Optics and Precision Engineering Vol. 19, Issue 8, (2011)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：10 December 2010，
  
  Revised：20 January 2011，
  
  Published Online：21 October 2011，
  
  Published：25 August 2011
- 稿件说明：
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吴宏圣. 一种提高光栅莫尔条纹信号质量的新滤波方法[J]. 光学精密工程, 2011, 19(8): 0-0.

WU Hong-Ku. A new filtering method of improving quality of grating Moiré fringe[J]. Editorial Office of Optics and Precision Engineering, 2011, 19(8): 0-0.
吴宏圣. 一种提高光栅莫尔条纹信号质量的新滤波方法[J]. 光学精密工程, 2011, 19(8): 0-0. DOI：

WU Hong-Ku. A new filtering method of improving quality of grating Moiré fringe[J]. Editorial Office of Optics and Precision Engineering, 2011, 19(8): 0-0. DOI：

摘要

针对莫尔条纹信号的质量问题提出一种新滤波方法：相位差滤波法。将指示光栅上四场裂相方式中每场细分为多个不同相位的行组合，利用行组合间的不同相位排列关系，来消弱高次谐波的分量，从而提高莫尔条纹信号的质量。首先，介绍了莫尔条纹的傅立叶级数表达式。接着，对莫尔条纹的各次谐波特性进行了分析。然后，通过指示光栅的图案设计实例，来阐明该滤波方法是如何消除二次、三次和四次谐波的。最后，通过仿真和实验的方法，验证了该滤波方法对削弱高次谐波的有效性。实验结果表明：该滤波方法可将莫尔条纹信号的三次谐波削弱4.9%

在20μm内测量精度提高了0.5μm。该方法只是改变了指示光栅的刻划图案，不增加制造成本和体积，实用性强，易于工业生产。

Abstract

A new filtering method to improve the quality of grating Moiré fringe is presented in this paper

named phase-difference filtering.Each field of the 4 field scanning reticle is devided into multi-lines with different phases

which achieves the suppression of high harmonic generations. In this way the quality of Moiré fringe signal is improved. . Firstly the Fourier series expression of Moiré fringe is introduced and various harmonic generations of the Moiré fringe are analysised. Then

the filtering method eliminating the second

third and fourth harmonic generations is illustrated with the designed grating patterns. Finally

the valid of the method to inhibit the high harmonic generations is verified through simulations and experiments. Experimental results indicate that the third harmonic generation of the Moiré fringe signal can be reduced by 4.9% and the accuracy can be improved by 0.5μm with period of 20μm. This method has the benefits of effective

low cost

without increasing the system size and easy-to industrial production.

关键词

Keywords

references

魏晓蓉,刘丰文.两种莫尔条纹信号对光栅系统测量精度的影响[J].光电工程,2002,29(6)：43-45.WEI X R, LIU F W. Influence of two Moire fringe signals on measuring accuracy of a grating system[J]. Opto-Electronic Engineering,2002,29(6)：43-45. (in Chinese)[2]罗华,高山,李翔龙. 粗光栅信号全数字化处理法实现高倍数细分[J].光学精密工程,2007,15(2):283-288. LUO H, GAO S , L I X L. Realization of high division number of coarse grating signals by fully digital processing method[J].Optics and Precision Engineering,2007,15(2):283-288. (in Chinese)[3]曹向群，黄维实，金彤.光栅计量技术[M].杭州：浙江大学出版社,1992.CHAO X Q,HUANG W S,JIN T. measuring grating technique[M]. Hang zhou：Zhejiang University Press, 1992. (in Chinese)[4] 许明耀,莫尔条纹余弦信息的提取方法[J].中南民族大学学报(自然科学版),2003,22(1):26-28.XU M Y. Picking-up Method in Morie Cosine Information[J].Journal of South -Central Universit y for Nation alities( Nat . Sci. Ed ition),2003,22(1):26-28. (in Chinese)[5]吕孟军.光栅莫尔条纹电子学细分技术研究[D].南京航空航天大学,2008.LV M J. Study on Electronic Subdivision of Grating MoiréFringe[D], Nanjing University of Aeronautics and Astronautics,2008. (in Chinese)[6]喻洪麟,黄良明,王远干.莫尔条纹信号的DSP滤波及细分技术研究[J].光电工程,2004,31(9):61-65.YU H L,HUANG L M,WANG Y G. Study on DSP filter and subdivision of Moirefringes signal[J] .Opto-ElectronicEngineering,2004,31(9):61-65. (in Chinese)[7]张善锺. 计量光栅技术[M]. 北京：机械工业出版社，1985.Zhang S Z. measuring grating technique[M]. Beijing：China Machine PRESS, 1985. (in Chinese)[8]佘琳. 编码器光电信号参数测量及细分误差评估[D].中国科学院研究生院,2004.She L.Measurement of Encoder Photoelectric Signal Parameters and Evaluation of Interpolation errors[D]. Graduate University of the Chinese Academy of Sciences,2004. (in Chinese)[9]陈勇,陈慧宝,孙桂清,等.光栅莫尔条纹信号质量的提高及其采集方法[J]. 上海大学学报( 自然科学版),2004,10(2):129-132.CHEN Y,CHEN HB,SUN G Q, et al.. Improving Qual ity of Grating MoiréFringe and a Collection Method [J]. Journal of Shanghai University(Natural Science) ,2004,10(2):129-132. (in Chinese)[10]刘春霞,张成元,杨卫卫,等. 编码器光电信号参数变化对莫尔条纹质量的影响[J].黑龙江大学自然科学学报，2009,26(4),:547-550.LIU C X, ZHANG C Y, YANG W W, et al.. The influence on the moiré fringe quality with the change from the optic -electro signals of the encoder [J]. Journal of Natural Science of Hei long jiang University,2009,26(4):547-550. (in Chinese)

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