Objetive: To improve the efficiency of optical conversion and the spatial adaptability of conventional 2D tilt mirrors

non-perpendicular 2D MEMS tilt mirrors were presented in this paper. Method: Mirrors were fabricated by POLYMUMPS process and their upper electrodes were asymmetrically fixed on the substrate

mirrors were tilted around two non-perpendicular axes by applying voltages. By constructing mirrors with three layer membranes

effects of the upper electrode’s deformation on the flatness of the mirrors’ surface were eliminated. With the aids of dimples fabricated on the upper electrode and the small overlapped area of mirrors’ electrodes on the edges of upper electrodes

limitations by the pull-in effect were eliminated. The designed electrodes would make sure that forces produced by applied voltages to produce large moments. Result: The working voltages of mirrors were low

at 3.5 V

the tilting angles of mirrors around X- and Y- axis were 0.16o and 0.03o

respectively

the angle between X axis and Y axis was145.37o . Conclusion: The mirrors rotate around two non-perpendicular axes independently

the advantages of this design are simple structures

big reflective mirror surfaces and good spatial adaptability. Moreover

the pull-in effect of this mirror is eliminated.