Fabrication research of a high fill-factor micro-mirror array with multi-terraced-plate structure

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Fabrication research of a high fill-factor micro-mirror array with multi-terraced-plate structure

Micro/Nano technology and fine mechanics | 更新时间：2020-08-12

- Fabrication research of a high fill-factor micro-mirror array with multi-terraced-plate structure
- Optics and Precision Engineering Vol. 19, Issue 8, (2011)
- 作者机构：
  
  1. 中国科学院研究生院
  2. 中国科学院上海微系统与信息技术研究所
  3. 中国科学院上海微系统与信息技术研究所3. 上海微系统所与信息技术研究所4. 中科院上海微系统与信息技术研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：24 August 2010，
  
  Revised：12 January 2011，
  
  Published Online：21 October 2011，
  
  Published：25 August 2011
- 稿件说明：
移动端阅览
李四华,龙亮,钟少龙,徐静,吴亚明. 多台阶平板静电驱动的高占空比微镜阵列研制[J]. 光学精密工程, 2011, 19(8): 0-0.

LI Si-Hua,MANG Liang,ZHONG Shao-Long,XU Jing,WU Ya-Meng. Fabrication research of a high fill-factor micro-mirror array with multi-terraced-plate structure[J]. Editorial Office of Optics and Precision Engineering, 2011, 19(8): 0-0.
李四华,龙亮,钟少龙,徐静,吴亚明. 多台阶平板静电驱动的高占空比微镜阵列研制[J]. 光学精密工程, 2011, 19(8): 0-0. DOI：

LI Si-Hua,MANG Liang,ZHONG Shao-Long,XU Jing,WU Ya-Meng. Fabrication research of a high fill-factor micro-mirror array with multi-terraced-plate structure[J]. Editorial Office of Optics and Precision Engineering, 2011, 19(8): 0-0. DOI：

摘要

为了实现在限定驱动电压下获得大镜面尺寸大扭转角度的微镜阵列。提出了一种多台阶平板静电驱动结构的微镜阵列。理论分析了多台阶平板结构与平行平板结构在静电驱动时的区别。研究了多台阶平板结构的工艺制作并采用体硅加工工艺技术制作了多台阶平板静电驱动的微镜阵列。获得了微镜面尺寸达到600μm x 200μm，包含52个微镜面排布，占空比高达97%的微镜阵列。通过测试表明，制作的微镜面结构在驱动电压为164伏时可以实现最大1.1度的扭转角度，相对于传统的平行平板静电驱动结构大大降低了驱动电压。

Abstract

Micro-mirrors array is one of the most important devices in the Micro-Optical Electro Mechanical system (MOMES) field. It can be widely used in various macro optical areas

such as Optical communication

Adaptive optics

projection or imaging

etc. In order to obtain a micro-mirror array with large torsional angle and large size of micro-mirror under limited driving voltage

in this paper

we propose and demonstrate a novel MOEMS micro-mirror array with multi-terraced-plate structure. The difference characterization of electrostatic driver between the multi-terraced-plate structure and parallel-plate structure are analyzed. The multi-terraced-plate structure as a key fabrication process of micro-mirror array has been researched and a bulk Micro-mechanical technology is used for fabricating the Micro-mirror array. Micro-mirror size is 600 by 200μm

and contains 52 micromirror array with a high fill-factor in excess of 97% have been achieved. The test results show that the micro-mirror have a maximum torsional angle about 1.1 degrees with a 164v driving voltage. In contrast with the traditional Parallel-plate structure

the multi-terraced-plate structure can greatly reduce the driving voltage.

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Fabrication of high fill-factor micro-mirror array with multi-terraced-plate structure

Related Author

LI Si-hua

XU Jing

LONG Liang

ZHONG Shao-long

WU Ya-ming

Related Institution

State Key Laboratory of Transducer Technology and the Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences

Graduate University of Chinese Academy of Sciences, Beijing 100039, China

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