In order to uniform thickness photoresist coating on the concave spherical surface

the coating technology of centrifugal is researched. First

the critical factors that affect the evenness of photosensitive resist and the film forming force are investigated. Then

the centrifugal glue adhesive force during the flow state is analysed with the hydrodynamic theory of the spherical photoresist spin coating down opening. A mathematical model which describes the relationship among the film thickness and centrifuge speed and viscosity of photoresist and time of spin coating is derived. Finally

in order to verify the correctness of the formula

some experiments of photoresist spin coating on the concave sphere of diameter φ120mm

radius 300mm

vector height 12.5mm of K9 glass dome are carried out. The result which has been tested is certificated that the theory is consistent with the actual situation

The paper analyzed the fomula and concluded: when the axis of photoresist pin coating should be disalignment with the main axis of electric engine

uniform film thickness on the inner surface of the entire sphere can be obtained. When the viscosity of 110~190centipoise

the speed of 3000~6000/r.min-1

the uniform film thickness of 0.5μm ~1μm can be get on concave sphere.