On the basis of research of L1B4 board-type horizontal ultrasonic linear motors

a kind of board-type horizontal ultrasonic linear micromotor in sizes of 36 mm×5 mm×4 mm is studied. The working principle and moving mechanism of this micromotor are described

and the miniaturizing design of the micro stator is executed by Finite Element Analysis(FEA) method. Then the vibration modes of the prototype are analyzed to realize the frequency degeneration. By using linear dynamic frequency response to simulate excited piezoelectricity

the layout of prototype with 5 PZTs and that of accustomed one with 2 PZTs are compared. Obtained results approve that the structure with 5 PZTs increases the vibrating displacement of an output point.The feature testing of prototype is carried out

and the experimental results show that this motor can offer the maximum velocity of 183.7 mm/s and the maximum thrust force of 50 mN

while excitation frequency is 62 kHz and voltage is 150 Vpp. This motor can be expected to be used in the linear driving field that has narrow space and needs certain driving force.