A high-speed movement measuring machine controlled by a closed-loop system was developed to calibrate high-speed movement measuring devices.The machine could be set motion parameters and could do high-speed movement according to sine wave and triangular wave velocity curves. A granite service platform and aerostatic bearing sliders were used in the measuring machine and a linear motor and a PMAC motion controlling card were used in its high-speed drive system. Furthermore

the reflective steel grating scale was taken as a sensor to detect the displacement and feedback control. A rubidium atomic clock was used as the time basis of a high-speed data acquisition system

then the high-speed data acquisition of the displacement was implemented by the high-speed data acquisition system based on the Field Programmable Gate Array(FPGA) controlled by a high precision time interval generator. Experimental results show that the speeds of the measuring machine reach 5.3 m/s and 7.6 m/s

respectively

while it moves the distance of 300 mm according to the sine wave and triangular wave velocity curves

and the displacements following error range are -1.56-1.01 mm and -1.41-2.23 mm

respectively. These results show that the measuring machine can be used in the calibration of high-speed movement devices.