Micro-vision positioning systems for IC packaging

LI Jun-lan; ZHANG Da-wei; WANG Yi-zhong; ZHAO Xing-yu; KONG Fan-zhi

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Micro-vision positioning systems for IC packaging

Article | 更新时间：2020-08-13

- Micro-vision positioning systems for IC packaging
- Optics and Precision Engineering Vol. 18, Issue 4, Pages: 965-972(2010)
- 作者机构：
  
  1. ．天津大学机械工程学院天津,300072
  2.  2．天津科技大学电子信息与自动化学院天津,300222
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：04 June 2009，
  
  Revised：09 September 2009，
  
  Published Online：22 April 2010，
  
  Published：22 April 2010
- 稿件说明：
移动端阅览
李君兰，张大卫，王以忠，赵兴玉，孔凡芝. 面向IC封装的显微视觉定位系统[J]. 光学精密工程, 2010,18(4):965-972

LI Jun-lan, ZHANG Da-wei, WANG Yi-zhong, et al. Micro-vision positioning systems for IC packaging[J]. Optics and precision engineering, 2010, 18(4): 965-972.
李君兰，张大卫，王以忠，赵兴玉，孔凡芝. 面向IC封装的显微视觉定位系统[J]. 光学精密工程, 2010,18(4):965-972 DOI：

LI Jun-lan, ZHANG Da-wei, WANG Yi-zhong, et al. Micro-vision positioning systems for IC packaging[J]. Optics and precision engineering, 2010, 18(4): 965-972. DOI：

摘要

为了实现IC封装设备视觉定位系统的整体构建，在分析面向IC封装的视觉系统的基础上，对显微成像系统、视觉系统标定以及模式识别定位算法进行了研究。针对面向IC封装的视觉定位系统的特点，搭建视觉系统，并进行了系统标定。用Matlab编写了模式识别定位软件界面，并进行了相关试验研究。实验分析了系统的定位精度和稳定性，实验结果表明，标定误差基本满足正态分布，XY方向的平均误差为0.014 5和0.106 5 pixel，方差为0.310 3和0.277 5 pixel。经过对视觉定位系统的标定，并使用某种IC芯片进行实际定位实验，结果显示匹配定位误差可以控制在3.5 μm（0.4 pixel）以内。该视觉系统实现了亚像素级的定位精度。

Abstract

On the basis of analysis on vision systems for IC packaging

the micro-imaging systems

vision system calibration and pattern recognition locating algorithms are explored to realize the whole establishment of vision positioning system of IC packaging equipment. Aiming at characteristics of IC packaging

an experimental facility of vision system is established

and the system calibration is carried out. A series of pattern recognition locating programs are written with Matlab

and experiments are undertaken to analyze the precision and stability. Experimental results indicate that the calibration errors meet the requirement of normal distribution. The average errors of XY directions are 0.014 5 and 0.106 5 pixel

and the variances are 0.310 3 and 0.277 5 pixel. After system calibration and locating experiments by using a kind of IC chip

results show that the positioning error is less than 3.5 μm(0.4 pixel). The vision system has achieved a sub-pixel precision.

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