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Compact high-precision soft X-ray and extreme ultraviolet reflectometer
Article | 更新时间:2020-08-13
    • Compact high-precision soft X-ray and extreme ultraviolet reflectometer

    • Optics and Precision Engineering   Vol. 16, Issue 10, Pages: 1886-1890(2008)
    • Received:01 November 2007

      Revised:26 June 2008

      Published Online:25 October 2008

      Published:25 October 2008

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  • Compact high-precision soft X-ray and extreme ultraviolet reflectometer[J]. Optics and precision engineering, 2008, 16(10): 1886-1890. DOI:

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NI Qi-liang
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Related Institution

State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences. Changchun 130033, China
State Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
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