Use self-made TIS scatterometer to evaluate the performance of the surface modification of silicon carbide mirror

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Use self-made TIS scatterometer to evaluate the performance of the surface modification of silicon carbide mirror

Article | 更新时间：2020-08-13

- Use self-made TIS scatterometer to evaluate the performance of the surface modification of silicon carbide mirror
- Optics and Precision Engineering Vol. 16, Issue 10, Pages: 1841-1846(2008)
- 作者机构：
  
  长春光机所
- 作者简介：
- 基金信息：
- DOI：
  CLC： 0484.4;TN307
- Received：16 May 2008，
  
  Revised：13 June 2008，
  
  Published Online：25 October 2008，
  
  Published：25 October 2008
- 稿件说明：
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申振峰,高劲松. 用自制总积分散射仪进行SiC基底表面改性效果评估[J]. 光学精密工程, 2008,16(10):1841-1846

Use self-made TIS scatterometer to evaluate the performance of the surface modification of silicon carbide mirror[J]. Optics and precision engineering, 2008, 16(10): 1841-1846.
申振峰,高劲松. 用自制总积分散射仪进行SiC基底表面改性效果评估[J]. 光学精密工程, 2008,16(10):1841-1846 DOI：

Use self-made TIS scatterometer to evaluate the performance of the surface modification of silicon carbide mirror[J]. Optics and precision engineering, 2008, 16(10): 1841-1846. DOI：

摘要

根据总积分散射理论和工程需要自制了半球式总积分散射仪，并应用其对SiC基底表面改性的效果进行检测和评估。其优点是操作简单，方便快捷，不接触样品，对表面无损害。通过对测试数据的分析和与分光光度计的对比可知，从散射特性角度对SiC基底表面改性效果进行评估是合理有效的，该总积分散射仪的测试结果是准确可靠的。

Abstract

A TIS scatterometer is manufactured based on the theory of total integrated scattering for the engineering needs and it is used to evaluate the performance of the surface modification of silicon carbide mirror.The merits of this device include that the operation on it is very simple

convenient and rapid.It needn’t to touch the surface of the sample in the testing process thus there is no risk to destroy it.The analysis of the testing datas and the comparation to Lambda 900 spectrometer show that it is reasonable and effective to evaluate the performance of the surface modification by means of scattering characteristic and the testing results of the TIS scatterometer is exact and reliable.

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Related Author

申振峰

郑宣鸣

王笑夷

龚盾

高劲松

王彤彤

陈红

Xiao-zhan YANG

Related Institution

长春光机与物理所2. 长春光学精密机械与物理研究所3. 长春光机所

Chongqing Key Laboratory of Green Energy Materials Technology and Systems

School of Physics and Energy, College of Science, Chongqing University of Technology

Sixth Affiliated Hospital Sun Yat-sen University

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

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