Design of diffractive optical elements for off-axis illumination in lithography system

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Design of diffractive optical elements for off-axis illumination in lithography system

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- Design of diffractive optical elements for off-axis illumination in lithography system
- Optics and Precision Engineering Vol. 16, Issue 11, Pages: 2081-2086(2008)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：26 February 2008，
  
  Revised：02 April 2008，
  
  Published Online：25 November 2008，
  
  Published：25 November 2008
- 稿件说明：
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张巍,巩岩. 投影光刻离轴照明用衍射光学元件设计[J]. 光学精密工程, 2008,16(11):2081-2086

Design of diffractive optical elements for off-axis illumination in lithography system[J]. Optics and precision engineering, 2008, 16(11): 2081-2086.
张巍,巩岩. 投影光刻离轴照明用衍射光学元件设计[J]. 光学精密工程, 2008,16(11):2081-2086 DOI：

Design of diffractive optical elements for off-axis illumination in lithography system[J]. Optics and precision engineering, 2008, 16(11): 2081-2086. DOI：

摘要

离轴照明（OAI：Off-axis Illumination）作为一种重要的分辨率增强技术（RET：Resolution Enhancement Technology）被广泛的应用于投影光刻系统。使用衍射光学元件（DOE：Diffractive Optical Element）作为光刻照明系统的光束整形器件，能够在保持较高照明效率的基础上精确控制离轴照明光束的形状及光强分布。本文利用基于傅立叶变换的分步迭代方法进行了该类DOE的优化设计。DOE采用了多台阶位相结构，设计所得8台阶DOE设计结果分别实现了偶极、四极、环形及Bulls-Eye等照明方式，其照明效率都达到了80%以上，与目标光强分布的均方根偏差均小于7％。

Abstract

Being one of the very important RETs (Resolution Enhancement Technology)

OAI (Off-axis Illumination) is widely applied to optical lithography system. The advantages of adopting DOE (Diffractive optical element) to realized OAI are not only the flexible illumination shape available but also the controllability of the intensity profile in addition to the higher efficiency of light source. In this paper

the four DOEs that have 8 phase level are designed by using the step-iterative algorithm

and the four elements can realize dipole

quadrupole

annular and Bulls-Eye illuminations respectively. The simulation results show that their efficiency of light source are all better than 80% and the RMS (Root-Mean-Square) of intensity profile compared with the ideal ones are all smaller than 7%.

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