IAD-Si Coatings on RB-SiC Space Mirrors for super-polished surface

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IAD-Si Coatings on RB-SiC Space Mirrors for super-polished surface

Article | 更新时间：2020-08-13

- IAD-Si Coatings on RB-SiC Space Mirrors for super-polished surface
- Optics and Precision Engineering Vol. 16, Issue 12, Pages: 2497-2502(2008)
- 作者机构：
  
  长春光机所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：27 August 2008，
  
  Revised：04 November 2008，
  
  Published Online：25 December 2008，
  
  Published：25 December 2008
- 稿件说明：
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徐领娣,郑立功,范镝,张学军,王加朋. 空间RB-SiC反射镜的表面离子辅助镀硅改性技术[J]. 光学精密工程, 2008,16(12):2497-2502

IAD-Si Coatings on RB-SiC Space Mirrors for super-polished surface[J]. Optics and precision engineering, 2008, 16(12): 2497-2502.
徐领娣,郑立功,范镝,张学军,王加朋. 空间RB-SiC反射镜的表面离子辅助镀硅改性技术[J]. 光学精密工程, 2008,16(12):2497-2502 DOI：

IAD-Si Coatings on RB-SiC Space Mirrors for super-polished surface[J]. Optics and precision engineering, 2008, 16(12): 2497-2502. DOI：

摘要

针对空间用RB-SiC材料由Si\SiC两相结构引起的光学表面缺陷问题，提出了表面离子辅助沉积（IAD）硅膜的改性新方案以优化RB-SiC光学表面反射率。对厚度为10m的IAD-Si改性层的主要性能研究显示：IAD-Si膜层为非结晶结构，能够提供较好的抛光表面，在77K-673K的热冲击下膜层稳定性良好。以Si膜的抛光机理为依据对IAD-Si改性层进行了大量抛光工艺实验和表面质量测试，给出了关键的抛光工艺参数和实验结果。通过表面IAD-Si改性及本文提出的改性层超精加工技术能够在反射镜表面得到面形精度的RMS值低于1/20λ(λ=632.8nm)且表面粗糙度的RMS值低于0.5nm的超光滑表面；与改性前相比，反射镜改性层抛光表面在360-1100 nm 波段的反射率提高了4.5%以上。

Abstract

To eliminate surface limitation caused by Silicon impurity in RB-SiC apace mirrors

a relatively thick Si film is deposited on well finished RB-SiC substrate by ion assisted depositing(IAD) process to provide a better polishable surface. Firstly，The process of RB-SiC surface coating is summarized

on the polishing point of view. Secondly

severial properties of IAD-SiC coatings were tested. Results show that the amorphous film can satisfy all requirements of RB-SiC surface coating technique. Then

polishing experiments on 10±0.5m thick IAD-SiC layers were accomplished and testing results of surface roughness and reflectivity were given: surface roughess of the coating after polished achieved less than 0.5nm RMS ; moreover

reflectivity of IAD-Si polished surface with reflective films increased up to 4.5% than that of RB-SiC in 360-1100nm wavelength. The results indicated that IAD-Si coating technique and the new polishing process showed an access to high quality RB-SiC space mirrors.

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Related Institution

College of Mechanical and Vehicle Engineering， Chongqing University

Key Laboratory of Optical System Advanced Manufacturing Technology， Chinese Academy of Sciences

School of Mechatronics Engineering， Harbin Institute of Technology

长春光学精密机械与物理研究所

College of Mechanical and Vehicle Engineering of Chongqing University

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