Testing technology for large aperture SiC asphere mirror

doi:null

您当前的位置：

首页 >

文章列表页 >

Testing technology for large aperture SiC asphere mirror

Article | 更新时间：2020-08-13

- Testing technology for large aperture SiC asphere mirror
- Optics and Precision Engineering Vol. 16, Issue 12, Pages: 2491-2496(2008)
- 作者机构：
  
  长春光机所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：28 September 2008，
  
  Revised：23 October 2008，
  
  Published Online：25 December 2008，
  
  Published：25 December 2008
- 稿件说明：
移动端阅览
薛栋林. 大口径碳化硅材料凸非球面反射镜检验技术[J]. 光学精密工程, 2008,16(12):2491-2496

Testing technology for large aperture SiC asphere mirror[J]. Optics and precision engineering, 2008, 16(12): 2491-2496.
薛栋林. 大口径碳化硅材料凸非球面反射镜检验技术[J]. 光学精密工程, 2008,16(12):2491-2496 DOI：

Testing technology for large aperture SiC asphere mirror[J]. Optics and precision engineering, 2008, 16(12): 2491-2496. DOI：

摘要

为了实现某大口径碳化硅材料凸非球面反射镜检验，研究了无像差点法以及补偿检验法方案，经过方案比较优选，确定选用补偿检验方案并专门设计了高精度大口径非球面补偿器，设计精度为PV：0.0082，RMS：0.0029（=0.6328nm），采用会聚光束、使用大口径数字干涉仪进行凸非球面正面检测，采用该方法进行检验凸非球面反射镜最终检测结果为0.022（RMS）本文所述补偿器的设计方法和要求具有普遍性，设计结果也可用于同类型大口径凸非球面检验用补偿器的设计。采用该方法提高了凸非球面检测精度，并且在凸非球面镜的材料选择、结构设计、支撑方式等方面提供了更多的优化空间，为新型光学材料在凸非球面反射镜的应用铺平了道路。

Abstract

In order to realize testing of a large aperture SiC convex asphere

aberration free testing method and compensator tesing method are analyzed. After majorized comparison

null lens testing method is selected. Offner null lens for large SiC Convex asphere are designed．The design results indicate that the precision of the system’s is PV：0.0082，RMS：0.0029（=0.6328nm）， large aperture zygo interferometer is used and convergent testing method is adapted . The final testing results or the mirror is 0.022（RMS）. Th e design method is universal and the design results can be used in the compensator design for other convex SiC mirror．The testing result of convex asphere is improved

the selection of the material and supporting structure etc. is majorized

it give more chance for new style of convex asphere mirror.

关键词

Keywords

references

Views

384

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

230 mm aperture RB-SiC mirror by reaction-formed joint

Fabrication of SiC mirror in full aperture with optimized fixed abrasive polishing pad

Study on removal function based on computer controlled grinding SiC mirror with fixed abrasive

Study on experiment of grinding SiC mirror with fixed abrasive

Weightlight SiC Mirror Technology

Related Author

ZHANG Bin-zhi

ZHANG Ge

DONG De-yi

WANG Xu

王旭

MA Wen-Li

SHEN Mang-Zuo

Related Institution

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

University of Chinese Academy of Sciences, Beijing 100039, China

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

中国科学院长春光学精密机械与物理研究所

Institute of Optics and Electronics, Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰