Surface Modification Influence of SiC Mirrors on Signal Noise Ratio of TMC Optical System

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Surface Modification Influence of SiC Mirrors on Signal Noise Ratio of TMC Optical System

Article | 更新时间：2020-08-13

- Surface Modification Influence of SiC Mirrors on Signal Noise Ratio of TMC Optical System
- Optics and Precision Engineering Vol. 17, Issue 12, Pages: 2952-2958(2009)
- 作者机构：
  
  长春光机与物理所2. 长春光学精密机械与物理研究所3. 长春光机所
- 作者简介：
- 基金信息：
- DOI：
  CLC： 0484.4TN307
- Received：22 April 2009，
  
  Revised：18 June 2009，
  
  Published Online：25 December 2009，
  
  Published：25 December 2009
- 稿件说明：
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陈红,王彤彤,高劲松,龚盾,王笑夷,郑宣鸣,申振峰. SiC反射镜表面改性对TMC光学系统信噪比的影响[J]. 光学精密工程, 2009,17(12):2952-2958

Surface Modification Influence of SiC Mirrors on Signal Noise Ratio of TMC Optical System[J]. Optics and precision engineering, 2009, 17(12): 2952-2958.
陈红,王彤彤,高劲松,龚盾,王笑夷,郑宣鸣,申振峰. SiC反射镜表面改性对TMC光学系统信噪比的影响[J]. 光学精密工程, 2009,17(12):2952-2958 DOI：

Surface Modification Influence of SiC Mirrors on Signal Noise Ratio of TMC Optical System[J]. Optics and precision engineering, 2009, 17(12): 2952-2958. DOI：

摘要

SiC（Silicon Carbide）反射镜由于固有的缺陷，在使用时会影响反射式光学系统的信噪比。采用表面改性技术后，Wyko轮廓仪测试表明SiC反射镜的粗糙度由10.42nm（Ra）降低到了0.95nm（Ra），镀制了银反射膜和增强膜后，主镜、次镜、三镜及折叠镜在0.5μm-0.8μm的可见光波段反射率＞98%。计算的结果表明应用了表面改性技术后TMC反射式光学系统的信噪比提高了5%以上。

Abstract

Signal noise ratio of TMC optical system is significantly influenced by the intrinsic defects of SiC (Silicon Carbide) mirror. After applying surface modification technique

Wyko profilometer indicates the roughness of a SiC mirror is reduced from 10.42nm (Ra) to 0.95nm (Ra). Then silver coating and enhanced coating have been coated on primary mirror

secondary mirror

tertiary mirror and fold mirror. Reflectivity is higher than 98% of each mirror between 0.5μm-0.8μm wavelength. Calculation results indicate that signal noise ratio has improved 5% after surface modification.

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Related Institution

长春光机所

Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences

Chongqing Key Laboratory of Green Energy Materials Technology and Systems

School of Physics and Energy, College of Science, Chongqing University of Technology

Sixth Affiliated Hospital Sun Yat-sen University

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