Research on electrostatic deformation of membrane mirror

ZHANG Ying

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Research on electrostatic deformation of membrane mirror

Article | 更新时间：2020-08-13

- Research on electrostatic deformation of membrane mirror
- Optics and Precision Engineering Vol. 17, Issue 2, Pages: 267-273(2009)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH704O44
- Received：21 January 2008，
  
  Revised：28 March 2008，
  
  Published Online：25 February 2009，
  
  Published：25 February 2009
- 稿件说明：
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张鹰. 薄膜反射镜静电成形机理研究[J]. 光学精密工程, 2009,17(2):267-273

ZHANG Ying. Research on electrostatic deformation of membrane mirror[J]. Optics and precision engineering, 2009, 17(2): 267-273.
张鹰. 薄膜反射镜静电成形机理研究[J]. 光学精密工程, 2009,17(2):267-273 DOI：

ZHANG Ying. Research on electrostatic deformation of membrane mirror[J]. Optics and precision engineering, 2009, 17(2): 267-273. DOI：

摘要

薄膜反射镜是一种正在发展中的新概念技术，它将解决反射镜孔径与重量相互制约的问题。采用静电拉伸法控制薄膜反射镜面形，具有结构简单、反射镜面形易于控制等优点，其原理为利用静电场上库仑力作用使薄膜产生面形变化，生成所需的光学曲面。由于薄膜变形力学，以及静电场理论的复杂性，目前薄膜成形及其面形控制在理论分析上仍未有定量的结果。本文主要从理论上分析了静电场中空间电势分布特性，以单电极静电场中的薄膜反射镜面形为考察因素，通过数值计算的方法得到薄膜反射镜上的静电力分布，运用有限元分析获得该分布下的反射镜面形，并将其与理想面形进行了比较。提出采用多电极闭环控制可获得更高的控制精度，对静电拉伸薄膜的研究工作具有重要的指导意义。

Abstract

The control method of Stretched Membrane with Electrostatic Curvature (SMEC) Mirror has advantages of simple structure and easy membrane mirror figure cybernation. Its principle is to make membrane mirror figure change with the sequence of electrostatic force to get the needed optical curvature figure. As for the complexion of membrane shaping mechanics and electrostatic field theory

there is no quantitative theory analysis in membrane shaping and mirror figure cybernation. In this article

the distribution characteristic of space electric potential is analyzed in theory

and the electrostatic force distribution is obtained by numerical calculation. Considering single electrode mode

after electrostatic force calculation with MATLAB

the membrane mirror figure is mainly inspected by finite element method. Then the analysis result of finite element method is compared with ideal paraboloid figure

the differences between them will perceptibly show that the surface shape control force in single electrode mode is simplex. To get flexible modulation

multi electrode mode control is an advisable option. It is also proposed that higher control precision can be acquired by using closed loop multi electrode control

which is instructive to the study of SMEC mirror.

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Related Author

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Jian-hua ZHENG

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WANG Hu

MA Zhen

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Related Institution

University of Chinese Academy of Sciences

National Space Science Center， Chinese Academy of Sciences

Shanghai Institute of Technical Physics, Chinese Academy of Sciences

Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

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