Research on different pressure microflow sensors based on Lamb waves

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Research on different pressure microflow sensors based on Lamb waves

Article | 更新时间：2020-08-13

- Research on different pressure microflow sensors based on Lamb waves
- Optics and Precision Engineering Vol. 17, Issue 5, Pages: 1033-1038(2009)
- 作者机构：
  
  长春光学精密机械与物理研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：29 August 2008，
  
  Revised：07 October 2008，
  
  Published Online：25 May 2009，
  
  Published：25 May 2009
- 稿件说明：
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光玲玲. Lamb波压差式微流量传感器的研究[J]. 光学精密工程, 2009,17(5):1033-1038

Research on different pressure microflow sensors based on Lamb waves[J]. Optics and precision engineering, 2009, 17(5): 1033-1038.
光玲玲. Lamb波压差式微流量传感器的研究[J]. 光学精密工程, 2009,17(5):1033-1038 DOI：

Research on different pressure microflow sensors based on Lamb waves[J]. Optics and precision engineering, 2009, 17(5): 1033-1038. DOI：

摘要

为提高微小流量检测的灵敏度，增大其动态范围，实现温度补偿，提出了一种基于Lamb波的压差式微流量传感器。此传感器主要由两个Lamb波传感器，中间以微通道相连接构成。流体流动时，利用Lamb波薄膜内应力的敏感特性，采用频率计量的方式间接测量微通道两端的压力差，并结合微通道的几何尺寸以及流动特性，利用流体仿真软件Fluent进行仿真获得流量。本文对长20mm，宽1mm，高50μm的微通道进行了微流量测试的相关实验。实验结果表明：在流量测试范围内，微通道两端的频率差与流量基本呈线性变化，其线性相关系数为0.9999；在微流量传感器没进行优化的前提下，其最小检测量为0.627μL/s。

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