Detection method of large aperture lens based on fringe tracking

An Qichang; Wang Kun; Liu Xinyue; Wu Xiaoxia; Li Hongwen

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Detection method of large aperture lens based on fringe tracking

更新时间：2023-02-13

- Detection method of large aperture lens based on fringe tracking
- Optics and Precision Engineering Pages: 1-6(2023)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所，吉林长春 130033
  2.中国科学院大学，北京 100039
  3.吉林省智能波前传感与控制重点实验室，吉林长春 130033
- 作者简介：
  
  E-mail： liuxinyue@ciomp.ac.cn
- 基金信息：
- DOI：
  CLC： TP394.1;TH691.9
- Published Online：13 February 2023，
- 稿件说明：
移动端阅览
安其昌,王鹍,刘欣悦等.基于条纹传感的大口径透镜检测[J].光学精密工程,

An Qichang,Wang Kun,Liu Xinyue,et al.Detection method of large aperture lens based on fringe tracking[J].Optics and Precision Engineering,
安其昌,王鹍,刘欣悦等.基于条纹传感的大口径透镜检测[J].光学精密工程, DOI：10.37188/OPE.XXXXXXXX.0001

An Qichang,Wang Kun,Liu Xinyue,et al.Detection method of large aperture lens based on fringe tracking[J].Optics and Precision Engineering, DOI：10.37188/OPE.XXXXXXXX.0001

摘要

为实现大口径透镜组的高质量集成，亟需一套透射波前检测系统，可实现米级跨度上的微米级精度检测。在此，针对大口径透射波前质量检测难题，通过结合非窄带干涉与条纹跟踪，获得元件相对倾斜以及支撑结构所引入的系统波前变化。首先，基于光纤互联架构，设计了子孔径分时复用测系统，其次，建立了斜率测量与最终系统波前的映射关系，分析了斜率重建过程对不同空间频率波前的影响。最后，利用桌面实验系统，针对探测原理进行了验证测试，在测试波长1 550纳米下，干涉感知信噪比优于15 dB，测量范围优于5微米，探测精度优于0.5微米。基于本文所提出的方法可实现大口径透镜透射波前大范围、高鲁棒、高精度的检测，对于未来大口径大视场望远镜的建设，具有十分重要的意义。

Abstract

In order to achieve high-quality integration of large aperture lens groups， a transmission wavefront detection system is urgently needed， which can achieve micron level accuracy detection on meter scale span. Here，To solve the problem of large aperture transmission wavefront quality detection， the relative tilt of components and the change of system wavefront introduced by the support structure are obtained by combining non narrowband interference with fringe tracking. Firstly， based on the optical fiber interconnection architecture， the sub aperture time-sharing multiplexing measurement system is designed. Secondly， the mapping relationship between the slope measurement and the final system wavefront is established， and the influence of the slope reconstruction process on the wavefront of different spatial frequencies is analyzed. Finally， the desktop experimental system was used to verify the detection principle. At the test wavelength of 1550nm， the interference sensing SNR was better than 15dB， the measurement range was better than 5 μ m， and the detection accuracy was better than 0.5 μ m. Based on the method proposed in this paper， the large aperture lens transmission wavefront can be detected in a large range， with high robustness and high accuracy， which is of great significance for the construction of large aperture large field of view telescopes in the future.

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references

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Related Institution

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