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Static characteristics of air-floating turntable of ultra-precision full-aperture polisher
Micro/Nano Technology and Fine Mechanics | 更新时间:2021-08-09
    • Static characteristics of air-floating turntable of ultra-precision full-aperture polisher

    • Optics and Precision Engineering   Vol. 29, Issue 7, Pages: 1640-1652(2021)
    • DOI:10.37188/OPE.2020.0564    

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  • Lei AN, Wei WANG, De-feng LIAO. Static characteristics of air-floating turntable of ultra-precision full-aperture polisher. [J]. Optics and Precision Engineering 29(7):1640-1652(2021) DOI: 10.37188/OPE.2020.0564.

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