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Static characteristics of air-floating turntable of ultra-precision full-aperture polisher
Micro/Nano Technology and Fine Mechanics | 更新时间:2021-08-09
    • Static characteristics of air-floating turntable of ultra-precision full-aperture polisher

    • Optics and Precision Engineering   Vol. 29, Issue 7, Pages: 1640-1652(2021)
    • DOI:10.37188/OPE.2020.0564    

      CLC: TH117
    • Received:30 October 2020

      Revised:02 December 2020

      Published:15 July 2021

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  • AN Lei,WANG Wei,LIAO De-feng.Static characteristics of air-floating turntable of ultra-precision full-aperture polisher[J].Optics and Precision Engineering,2021,29(07):1640-1652. DOI: 10.37188/OPE.2020.0564.

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