F-P interferometer vibration measurement experimental system based on ultra-small grin fiber probe

SUN Jian-mei; CHEN Fei-lu; YANG Chen-ye; LI Jin-hui; FANG Dong; WEN Zhu-li; WANG Chi

doi:10.37188/OPE.2020.0565

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F-P interferometer vibration measurement experimental system based on ultra-small grin fiber probe

Modern Applied Optics | 更新时间：2026-09-12

- F-P interferometer vibration measurement experimental system based on ultra-small grin fiber probe
- Optics and Precision Engineering Vol. 29, Issue 7, Pages: 1518-1526(2021)
- 作者机构：
  
  1.上海大学精密机械工程系，上海 200444
  2.近地面探测技术重点实验室，江苏无锡 214035
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.2020.0565
  CLC： TN253;TH744
- Received：13 October 2020，
  
  Revised：2020-12-10，
  
  Published：15 July 2021
- 稿件说明：
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孙建美,陈斐璐,杨辰烨等.基于超小GRIN光纤探头的F-P干涉仪测振实验[J].光学精密工程,2021,29(07):1518-1526.

SUN Jian-mei,CHEN Fei-lu,YANG Chen-ye,et al.F-P interferometer vibration measurement experimental system based on ultra-small grin fiber probe[J].Optics and Precision Engineering,2021,29(07):1518-1526.
孙建美,陈斐璐,杨辰烨等.基于超小GRIN光纤探头的F-P干涉仪测振实验[J].光学精密工程,2021,29(07):1518-1526. DOI： 10.37188/OPE.2020.0565.

SUN Jian-mei,CHEN Fei-lu,YANG Chen-ye,et al.F-P interferometer vibration measurement experimental system based on ultra-small grin fiber probe[J].Optics and Precision Engineering,2021,29(07):1518-1526. DOI： 10.37188/OPE.2020.0565.

摘要

搭建基于超小GRIN光纤探头的F-P干涉仪测振的实验系统，采用高精度纳米位移台作为被测振动体目标，在解析基于超小GRIN光纤探头的集成化F-P干涉仪工作性能的基础上，对被测振动体的微小振动进行多次实验测量，采集实验测量数据并分析该集成化F-P干涉仪的实验性能。实验结果显示，在给定实验条件下，该F-P光纤干涉仪在振幅为200~300 nm时的性能参数较好，线性度最小为0.42%，对应的灵敏度为7.507 V/μm，重复性标准差最大为0.232 V；在10~100 nm与350~500 nm，干涉仪测振系统有较好的重复性，其标准差小于0.102 V。该F-P干涉仪系统具有测量微小振动的可行性，有望应用在微小振动和位移等精确测量领域。

Abstract

An integrated F-P interferometer vibration measurement system based on the ultra-small GRIN fiber probe and its performance were studied. First， a high-precision nano-stage was used as the vibrating target to be measured and a corresponding vibration measurement system was built to measure and analyze the small vibrations. This measurement system was then used to perform multiple measurements of the tiny vibrations generated by the vibrating target. The experimental data were then processed to analyze the performance of the F-P interferometer. The results show that under the given experimental conditions， the F-P interferometer exhibits desirable performance in the vibration amplitude range of 200-300 nm； its minimum linearity is 0.42%， corresponding sensitivity is 7.507 V/μm， and maximum repeatability standard deviation is 0.232 V. Further， in the vibration amplitude ranges of 10-100 nm and 350-500 nm， the F-P interferometer has better repeatability and its standard deviation is less than 0.102 V. Therefore， the F-P interference vibration measurement system based on the ultra-small GRIN fiber probe can be used to measure small vibrations， thereby providing an experimental basis for further research on its application in the precise measurement of small vibrations and displacements.

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references

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