Research progress of surface acoustic wave ultraviolet detectors

Chang-shuai YIN; Jian ZHOU; Yi LIU; Jian-hui WU; Shuo XIONG; Hui-gao DUAN

doi:10.37188/OPE.20202807.1433

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Research progress of surface acoustic wave ultraviolet detectors

Modern Applied Optics | 更新时间：2020-08-13

- Research progress of surface acoustic wave ultraviolet detectors
- Optics and Precision Engineering Vol. 28, Issue 7, Pages: 1433-1445(2020)
- 作者机构：
  
  1.湖南大学机械与运载工程学院汽车车身设计与制造国家重点实验室, 湖南长沙 410082
  2.国家先进轨道交通装备创新中心, 湖南株洲 412000
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20202807.1433
  CLC： TN23
- Received：04 November 2019，
  
  Revised：15 January 2020，
  
  Accepted：15 January 2020，
  
  Published：15 July 2020
- 稿件说明：
移动端阅览
Chang-shuai YIN, Jian ZHOU, Yi LIU, et al. Research progress of surface acoustic wave ultraviolet detectors[J]. Optics and precision engineering, 2020, 28(7): 1433-1445.
DOI：

Chang-shuai YIN, Jian ZHOU, Yi LIU, et al. Research progress of surface acoustic wave ultraviolet detectors[J]. Optics and precision engineering, 2020, 28(7): 1433-1445. DOI： 10.37188/OPE.20202807.1433.

摘要

基于声表面波技术的紫外探测器具有响应速度快、灵敏度高、制作简单且可以无线无源监测等众多优势，成为近年来紫外探测领域的研究热点。本文根据紫外敏感薄膜分类综述了声表面波紫外探测的研究进展，剖析了声表面波紫外探测敏感机理，阐述了氮化镓、掺杂氮化镓、氧化锌、掺杂氧化锌、纳米结构氧化锌，氮化铝等敏感膜的材料特点、制备加工及其紫外探测器性能等。分析了近年来新型声表面波紫外传感器的研究状况，展望了声表面波紫外探测的未来发展趋势与挑战。

Abstract

Ultraviolet (UV) detectors based on the Surface Acoustic Wave (SAW) technology have become an active field of research owing to their advantages such as fast response

high sensitivity

simple fabrication

and wireless passive monitoring. In this study

the progress in the research of SAW UV detection

based on the classification of UV-sensitive films

was reviewed. The sensitive mechanism of SAW UV detection was analyzed and the characteristics

preparations

and UV performances of gallium nitride

doped gallium nitride

zinc oxide

doped zinc oxide

nanostructured zinc oxide

aluminum nitride

and other sensitive membrane materials were presented. This work also demonstrated the latest advancements in SAW UV sensors and their prospects in future development trends and challenges.

关键词

Keywords

references

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