Precision measurement of spherical grid geometrical features

Jian WANG; Fei LI; Liu-ping LIU

doi:10.37188/OPE.20202809.1939

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Precision measurement of spherical grid geometrical features

Modern Applied Optics | 更新时间：2020-09-28

- Precision measurement of spherical grid geometrical features
- Optics and Precision Engineering Vol. 28, Issue 9, Pages: 1939-1949(2020)
- 作者机构：
  
  1.中国科学院空天信息创新研究院, 北京 100407
  2.中国科学院高功率微波源与技术国防科技创新重点实验室, 北京 101407
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20202809.1939
  CLC： TN124
- Received：16 October 2019，
  
  Revised：22 November 2019，
  
  Accepted：22 November 2019，
  
  Published：25 September 2020
- 稿件说明：
移动端阅览
Jian WANG, Fei LI, Liu-ping LIU. Precision measurement of spherical grid geometrical features[J]. Optics and precision engineering, 2020, 28(9): 1939-1949.
DOI：

Jian WANG, Fei LI, Liu-ping LIU. Precision measurement of spherical grid geometrical features[J]. Optics and precision engineering, 2020, 28(9): 1939-1949. DOI： 10.37188/OPE.20202809.1939.

摘要

为了实现球面栅网零件几何要素的精密测量，快速筛选出满足电子光学设计要求的合格零件。对测量设备与附件的特点、零件的设计要求、加工工艺带来的常见超差问题进行研究。根据零件的测量要素，从测量效率和精度的角度考虑，选择了加装激光辅助对焦系统的影像测量仪。编写了自动测量程序，自动将粗定位定向转为精准定位定向，完成了零件全部几何要素的自动测量。针对“大半径、小圆弧”的测量难点，进行了量化分析和计算，得出了曲率半径测量结果不确定度的计算公式。最后，讨论了测量不确定度的来源，提出了抑制各误差源的方法。实际应用时，利用上述影像仪完成了栅网零件的曲率半径SR、栅网球面的面轮廓度、环向栅丝同心度、径向栅丝圆分度

、全部栅丝宽度

和

、端面外径及其圆度、端面平面度的自动精密测量。测量时间约为传统方式的2/3，测点数量达2 094个，远高于手动测量方式。

Abstract

This study aimed to achieve precise measurements for spherical grid geometrical features and screen the qualified parts for electron optical design requirements. Thus

the characteristics of the measuring equipment

its accessories

grid size design requirements

and common overproof problems caused by processing were studied. First

the optical measuring machine with a laser-assisted focusing system was selected

owing to its grid measurement features

efficiency

and accuracy. Then

an automatic measurement program was compiled

which automatically turned the coarse zero and orientation to the precise values and completed the automatic measurement of all the spherical grid geometrical features. Subsequently

in view of the 'big radius

small arc' measurement difficulty

quantitative analysis and calculations were performed to obtain the formula for the uncertainty of the curvature radius measurement. Finally

the sources of measurement uncertainty were discussed

and the methods for eliminating error sources were analyzed. In a practical application

the automatic and precise measurements of the spherical grid curvature radius

profile of the grid's spherical surface

circular grating wire concentricity

radial grating wire circle indexing

grating wire widths

outer diameter and its roundness

and the end surface flatness have been achieved. The measurement duration was approximately two thirds of the traditional method

and the number of measuring points was up to 2 094

which is considerably larger than the hand-operated method.

关键词

Keywords

references

胡林林 , 曾造金 , 陈洪斌 , 等 . 毫米波/太赫兹扩展互作用速调管放大器的应用及研究进展 . 电子学报 , 2019 . 47 ( 1 ): 211 - 219 . DOI: 10.3969/j.issn.0372-2112.2019.01.028 http://doi.org/10.3969/j.issn.0372-2112.2019.01.028 .

L L HU , Z J ZENG , H B CHEN , 等 . Application and development of extended interaction klystrons in millimeter-wave and terahertz band . Acta Electronica Sinica , 2019 . 47 ( 1 ): 211 - 219 . DOI: 10.3969/j.issn.0372-2112.2019.01.028 http://doi.org/10.3969/j.issn.0372-2112.2019.01.028 .

S V SAMSONOV , I G GACHEV , G G DENISOV , 等 . Ka-band gyrotron traveling-wave tubes with the highest continuous-wave and average power . IEEE Transactions on Electron Devices , 2014 . 61 ( 12 ): 4264 - 4267 . DOI: 10.1109/TED.2014.2364623 http://doi.org/10.1109/TED.2014.2364623 .

ARHIPOV D A, ILYINA E M, KUDRYASHOV V P, et al .. Creation of powerful broadband low-voltage small-sized grid-controlled pulse TWT over decimetre waves[C]. IVESC 2004. the 5 th International Vacuum Electron Sources Conference Proceedings ( IEEE Cat. No. 04 EX 839), 6-10 Sept. 2004, Beijing , China , 2004: 385-386.

LI X F, WANG J Y, HUI X. Thermal analysis of electron Gun with grid control in pulsed TWT[C]. IVESC 2004. the 5 th International Vacuum Electron Sources Conference Proceedings ( IEEE Cat. No. 04 EX 839), 6-10 Sept . 2004, Beijing , China , 2004: 185.

N N DZBANOVSKII , P V MINAKOV , A A PILEVSKII , 等 . High-current electron Gun with a field-emission cathode and diamond grid . Technical Physics , 2005 . 50 ( 10 ): 1360 - 1362 . DOI: 10.1134/1.2103286 http://doi.org/10.1134/1.2103286 .

郭继平 , 于冀平 , 彭翔 , 等 . 大面积平面网格尺寸快速检测方法及系统 . 自动化仪表 , 2016 . 37 ( 2 ): 69 - 71 . http://www.cnki.com.cn/Article/CJFDTotal-ZDYB201602024.htm http://www.cnki.com.cn/Article/CJFDTotal-ZDYB201602024.htm .

J P GUO , J P YU , X PENG , 等 . Fast speed detection method and system for the mesh size in large flat area . Process Automation Instrumentation , 2016 . 37 ( 2 ): 69 - 71 . http://www.cnki.com.cn/Article/CJFDTotal-ZDYB201602024.htm http://www.cnki.com.cn/Article/CJFDTotal-ZDYB201602024.htm .

王晓飞 , 裘祖荣 , 杨聪 , 等 . 基于影像测量仪的试验筛自动测量方法 . 数据采集与处理 , 2013 . 28 ( 2 ): 257 - 260 . http://www.cnki.com.cn/Article/CJFDTotal-SJCJ201302022.htm http://www.cnki.com.cn/Article/CJFDTotal-SJCJ201302022.htm .

X F WANG , Z R QIU , C YANG , 等 . Calibration method for test sieves based on video measuring machine . Journal of Data Acquisition & Processing , 2013 . 28 ( 2 ): 257 - 260 . http://www.cnki.com.cn/Article/CJFDTotal-SJCJ201302022.htm http://www.cnki.com.cn/Article/CJFDTotal-SJCJ201302022.htm .

陈建元 , 池宪 , 郭炜 , 等 . 非完整凹球面球径尺寸的准确测量方法 . 测控技术 , 2018 . 37 ( B11 ): 238 - 240, 404 . http://agri.ckcest.cn/literature/casdd/631282AD-512B-40D4-A4E2-47DDF1AD3969.html http://agri.ckcest.cn/literature/casdd/631282AD-512B-40D4-A4E2-47DDF1AD3969.html .

J Y CHEN , X CHI , W GUO , 等 . Accurate detection method for non-complete concave spherical diameters . Measurement & Control Technology , 2018 . 37 ( B11 ): 238 - 240, 404 . http://agri.ckcest.cn/literature/casdd/631282AD-512B-40D4-A4E2-47DDF1AD3969.html http://agri.ckcest.cn/literature/casdd/631282AD-512B-40D4-A4E2-47DDF1AD3969.html .

《电子工业生产技术手册》编委会 . 电子工业生产技术手册-4-电真空器件卷 , : 北京国防工业出版社 , 1990 .

《Manufacturing Technology Manual for Electronic Industry》 Editorial board . Manufacturing Technology Manual for Electronic Industry , : Beijing National Defense Industry Press , 1990 .

李杰 , 訾进锋 , 杨小君 , 等 . 飞秒激光微加工技术在航空发动机高压单晶涡轮叶片的应用 . 电加工与模具 , 2018 . ( S1 ): 54 - 58 . http://d.old.wanfangdata.com.cn/Periodical/djgymj2018z1012 http://d.old.wanfangdata.com.cn/Periodical/djgymj2018z1012 .

J LI , J F ZI , X J YANG , 等 . Application of femtosecond laser micro-machining technology in turbine blades of domestic aeroengine . Electromachining & Mould , 2018 . ( S1 ): 54 - 58 . http://d.old.wanfangdata.com.cn/Periodical/djgymj2018z1012 http://d.old.wanfangdata.com.cn/Periodical/djgymj2018z1012 .

訾进锋, 赵卫, 杨小君, 等.穿透感知技术在飞秒激光涡轮叶片制孔中的应用[C].第17届全国特种加工学术会议论文集, 中国: 广州, 中国机械工程学会特种加工分会和广东工业大学, 2017: 5.

ZI J F, ZHAO W, YANG X J, et al .. Application of Penetration Sensing Technology in Femtosecond Laser Turbine Blade Hole Making[C]. 17 th National Academic Conference on Special Processing , China , Guangzhou , Special processing branch of China Society of mechanical engineering and Guangdong University of Technology , 2017: 5. (in Chinese)

王东霞 , 温秀兰 , 乔贵方 . 工件圆度误差测量不确定度评定 . 光学精密工程 , 2018 . 26 ( 10 ): 2438 - 2445 . DOI: 10.3788/OPE.20182610.2438 http://doi.org/10.3788/OPE.20182610.2438 .

D X WANG , X L WEN , G F QIAO . Estimation of uncertainty in measuring the workpiece circularity error . Opt. Precision Eng. , 2018 . 26 ( 10 ): 2438 - 2445 . DOI: 10.3788/OPE.20182610.2438 http://doi.org/10.3788/OPE.20182610.2438 .

黄明 , 刘品宽 , 夏仰球 , 等 . 自研角度计量转台在圆分度器件校准中的应用 . 光学精密工程 , 2019 . 27 ( 1 ): 110 - 120 . http://www.cqvip.com/QK/92835A/20191/71887477504849574849485250.html http://www.cqvip.com/QK/92835A/20191/71887477504849574849485250.html .

M HUANG , P K LIU , Y Q XIA , 等 . Calibration of circular Division artifacts using a self-developed angle comparator . Opt. Precision Eng. , 2019 . 27 ( 1 ): 110 - 120 . http://www.cqvip.com/QK/92835A/20191/71887477504849574849485250.html http://www.cqvip.com/QK/92835A/20191/71887477504849574849485250.html .

国家质量监督检验检疫总局. JJF 1318-2011, 影像测量仪校准规范[S].北京: 中国质检出版社, 2012.

General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China. JJF 1318-2011, Calibration Specification for Imaging Probe Measuring Machines[S]. Beijing: China Quality and Standards Publishing house, 2012. (in Chinese)

周增林 , 李艳 , 谢元锋 , 等 . 电真空用冷轧钼薄板的晶粒取向与力学性能 . 稀有金属材料与工程 , 2019 . 48 ( 8 ): 2502 - 2506 . http://www.cnki.com.cn/Article/CJFDTotal-COSE201908017.htm http://www.cnki.com.cn/Article/CJFDTotal-COSE201908017.htm .

Z L ZHOU , Y LI , Y F XIE , 等 . Crystallographic orientation and mechanical performance of cold-rolled molybdenum sheets for vacuum electron devices . Rare Metal Materials and Engineering , 2019 . 48 ( 8 ): 2502 - 2506 . http://www.cnki.com.cn/Article/CJFDTotal-COSE201908017.htm http://www.cnki.com.cn/Article/CJFDTotal-COSE201908017.htm .

叶建华 , 高诚辉 , 曾寿金 . 复杂曲面的网格化自适应测点规划 . 光学精密工程 , 2019 . 27 ( 7 ): 1632 - 1639 . http://www.cnki.com.cn/Article/CJFDTotal-GXJM201907025.htm http://www.cnki.com.cn/Article/CJFDTotal-GXJM201907025.htm .

J H YE , C H GAO , S J ZENG . Mesh-based adaptive planning for complex surface accurate measurement . Opt. Precision Eng. , 2019 . 27 ( 7 ): 1632 - 1639 . http://www.cnki.com.cn/Article/CJFDTotal-GXJM201907025.htm http://www.cnki.com.cn/Article/CJFDTotal-GXJM201907025.htm .

国家质量监督检验检疫总局. JJF 1059.1-2012, 测量不确定度评定与表示[S].北京: 中国质检出版社, 2013.

General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China. JJF 1059.1-2012, Evaluation and Expression of Uncertainty in Measurement[S]. Beijing: China Quality and Standards Publishing house, 2013. (in Chinese)

陈志军 , 王小章 , 李剑锋 . 影像测量仪的光学成像误差分析及计算 . 测绘科学 , 2009 . 34 ( 4 ): 164 - 165, 143 . http://d.wanfangdata.com.cn/Periodical/chkx200904059 http://d.wanfangdata.com.cn/Periodical/chkx200904059 .

ZH J CHEN , X ZH WANG , J F LI . Analysis and calculation of the optic imaging error of imagine measuring instrument . Science of Surveying and Mapping , 2009 . 34 ( 4 ): 164 - 165, 143 . http://d.wanfangdata.com.cn/Periodical/chkx200904059 http://d.wanfangdata.com.cn/Periodical/chkx200904059 .

田留德 , 赵建科 , 王涛 , 等 . 测试设备位姿失调对自准直仪法测量圆分度误差的影响 . 光学精密工程 , 2017 . 25 ( 9 ): 2267 - 2276 . DOI: 10.3788/OPE.20172509.2267 http://doi.org/10.3788/OPE.20172509.2267 .

L D TIAN , J K ZHAO , T WANG , 等 . Influence of test equipment pose error on dividing error measurement based on autocollimator . Opt. Precision Eng. , 2017 . 25 ( 9 ): 2267 - 2276 . DOI: 10.3788/OPE.20172509.2267 http://doi.org/10.3788/OPE.20172509.2267 .

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