Impact of spatial light modulator pixel structure on wavefront reconstruction

Zhao-xian XIAO; Jin-peng WEN; Zi-xin ZHAO; Chen FAN

doi:10.37188/OPE.20202810.2151

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Impact of spatial light modulator pixel structure on wavefront reconstruction

Modern Applied Optics | 更新时间：2020-11-16

- Impact of spatial light modulator pixel structure on wavefront reconstruction
- Optics and Precision Engineering Vol. 28, Issue 10, Pages: 2151-2157(2020)
- 作者机构：
  
  1.中国工程物理研究院总体工程研究所, 四川绵阳 621999
  2.西安交通大学机械工程学院机械制造系统国家重点实验室, 陕西西安 710049
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20202810.2151
  CLC： O439
- Received：25 February 2020，
  
  Revised：02 April 2020，
  
  Accepted：02 April 2020，
  
  Published：25 October 2020
- 稿件说明：
移动端阅览
Zhao-xian XIAO, Jin-peng WEN, Zi-xin ZHAO, et al. Impact of spatial light modulator pixel structure on wavefront reconstruction[J]. Optics and precision engineering, 2020, 28(10): 2151-2157.
DOI：

Zhao-xian XIAO, Jin-peng WEN, Zi-xin ZHAO, et al. Impact of spatial light modulator pixel structure on wavefront reconstruction[J]. Optics and precision engineering, 2020, 28(10): 2151-2157. DOI： 10.37188/OPE.20202810.2151.

摘要

在利用液晶空间光调制器液晶分子等效折射率的变化实现光波前的动态调控，从而进行光学非球面的零位干涉测量时，液晶空间光调制器独立单元中像素离散化的尺度、单元结构的填充比例以及电控数字位阶都直接影响到波前调控精度。本文基于菲涅耳衍射原理以及离散傅里叶变换算法，使用物理光场数值分析软件VirtualLabTM分析了像素独立单元对液晶空间光调制器重建补偿波面精度的影响，建立波面经空间光调制器调制传播至待测表面的仿真模型，评估像素结构因素对波前重建的理论算法本底误差及构成像素结构的多因素耦合误差，重点关注像素尺寸采样频率与波前最大空间频率的匹配问题，提出根据重建波前理论模型反推选取符合高精度测量要求的空间光调制器，可有效降低动态检测系统的成本需求。理论计算得到制约空间光调制器重建高精度波面(RMS=0.01

)的因素与液晶分子响应的自身非线性以及基底空间不一致密切相关。

Abstract

The change of the equivalent refractive index of liquid crystal molecules in liquid crystal spatial light modulators has been used to achieve dynamic control of optical wavefronts

thus realizing zero position interference measurements of optical aspheric surfaces. However

the pixel pitch

filling ratio of the cell structure

and gray-level number directly affect the accuracy of wavefront control. This study is based on Fresnel diffraction theory and the discrete Fourier transform algorithm.The physical light field was analyzed using a numerical analysis software

VirtualLabTM.The influence of pixel-independent units on the reconstruction compensation wavefront precision of the liquid crystal spatial light modulator was investigated

and a simulation model of the wavefront propagating through the spatial light modulator to the surface to be measured was established.The theoretical algorithm's background error of wavefront reconstruction caused by the pixel structure factor was evaluated

and the multifactor coupling error of the image structure was determined by focusing on the sampling frequency of pixel size and the maximum space of thewavefront.For the frequency matching problem

a spatial light modulator was selected to meet the requirements of high-precision measurement according to the theoretical model of the reconstructed wavefront

thereby effectively reducing the cost of the dynamic detection system. Theoretical calculation shows that the factors that restrict the spatial light modulator in reconstructing the high-precision wavefront (root mean square error of 0.01

) are closely related to the nonlinearity of the liquid crystal molecular response and the inconsistency of the substrate space.

关键词

Keywords

references

赵达尊 , 张怀玉 . 空间光调制器 , : 北京北京理工大学出版社 , 1992 .

D Z ZHAO , H Y ZHANG . Spatial Light Modulator , : Beijing Beijing University of Technology Press , 1992 .

SATO K, TAKANO K. New type of electroholographic display system using LCDs[C]. Proc SPIE 4864, Three-Dimensional TV , Video , and Display , 2002, 4864: 114-121.

蔡冬梅 , 薛丽霞 , 凌宁 , 等 . 液晶空间光调制器相位调制特性研究 . 光电工程 , 2007 . 34 ( 11 ): 19 - 23 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gdgc200711005 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gdgc200711005 .

D M CAI , L X XUE , N LING , 等 . Characteristics of phase only liquid crystal spatial light modulator . Opto-Electronic Engineering , 2007 . 34 ( 11 ): 19 - 23 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gdgc200711005 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gdgc200711005 .

Z KUANG , W PERRIE , J LEACH , 等 . High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator . Applied Surface Science , 2008 . 255 ( 5 ): 2284 - 2289 . DOI: 10.1016/j.apsusc.2008.07.091 http://doi.org/10.1016/j.apsusc.2008.07.091 .

曾震湘 , 郑华东 , 卢小仟 , 等 . 空间光调制器曲面拼接实现全息三维显示视角拓展 . 中国光学 , 2015 . 8 ( 2 ): 227 - 233 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zggxyyygxwz201502009 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zggxyyygxwz201502009 .

ZH X ZENG , H D ZHENG , X Q LU , 等 . Viewing angle enlargement in holographic 3D display by spatial light modulators tiling in curved configuration . Chinese Optics , 2015 . 8 ( 2 ): 227 - 233 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zggxyyygxwz201502009 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zggxyyygxwz201502009 .

刘洪顺 , 王喆 , 胡琪 , 等 . 基于空间光调制器的层析成像技术 . 中国光学 , 2019 . 12 ( 6 ): 1338 - 1347 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zggxyyygxwz201906015 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zggxyyygxwz201906015 .

H SH LIU , ZH WANG , Q HU , 等 . Tomography technology based on spatial light modulator . Chinese Optics , 2019 . 12 ( 6 ): 1338 - 1347 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zggxyyygxwz201906015 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zggxyyygxwz201906015 .

A M WEINER . Femtosecond pulse shaping using spatial light modulators . Review of Scientific Instruments , 2000 . 71 ( 5 ): 1929 - 1960 . DOI: 10.1063/1.1150614 http://doi.org/10.1063/1.1150614 .

G SINCLAIR , J LEACH , P JORDAN , 等 . Interactive application in holographic optical tweezers of a multi-plane Gerchberg-Saxton algorithm for three-dimensional light shaping . Optics Express , 2004 . 12 ( 8 ): 1665 - 1670 . DOI: 10.1364/OPEX.12.001665 http://doi.org/10.1364/OPEX.12.001665 .

J ARINES , V DURÁN , Z JAROSZEWICZ , 等 . Measurement and compensation of optical aberrations using a single spatial light modulator . Optics Express , 2007 . 15 ( 23 ): 15287 - 15292 . DOI: 10.1364/OE.15.015287 http://doi.org/10.1364/OE.15.015287 .

C LI , M L XIA , Q Q MU , 等 . High-precision open-loop adaptive optics system based on LC-SLM . Optics Express , 2009 . 17 ( 13 ): 10774 - 10781 . DOI: 10.1364/OE.17.010774 http://doi.org/10.1364/OE.17.010774 .

白雪莲.液晶电视用于计算全息非球面测试技术的研究[D].南京: 南京理工大学, 2004.

BAI X L. Study on The Measurement Technology of CGH Aspheric Surface with LCD TV [D]. Nanjing: Nanjing University of technology, 2004. (in Chinese)

席庆奎.实时计算全息技术与误差理论分析研究[D].南京: 南京理工大学, 2007.

XI Q K. Research on the Error Theory and Application of the Real-time Computer-generated Holograms [D]. Nanjing: Nanjing University of Science and Technology, 2007.(in Chinese)

韩军 , 郑婷 , 聂亮 , 等 . 基于空间光调制器的波面重建优化方法研究 . 光子学报 , 2011 . 40 ( 9 ): 1413 - 1418 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gzxb201109026 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gzxb201109026 .

J HAN , T ZHENG , L NIE , 等 . Optimization method of reconstruct wavefront based on spatial light modulator . Acta Photonica Sinica , 2011 . 40 ( 9 ): 1413 - 1418 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gzxb201109026 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gzxb201109026 .

郑婷.基于SLM的CGH非球面检测技术研究[D].西安: 西安工业大学, 2012.

ZHENG T. Research on CGH Aspheric Testing Technology Based on SLM [D]. Xi'an: Xi'an Technological University, 2012.(in Chinese)

张瑾.基于SLM的标准波面重建算法研究[D].西安: 西安工业大学, 2010.

ZHANG J. Research of Standard Wavefront Reconstruction Algorithm Based on Spatial Light Modulator [D]. Xi'an: Xi'an Technological University, 2010.(in Chinese)

周昊.基于液晶空间光调制器计算全息检测非球面方法研究[D].哈尔滨: 哈尔滨理工大学, 2016.

ZHOU H. A Method for Testing Aspheric Surface Using Computer Generated Hologram Based on Liquid Crystal Spatial Light Modulator [D]. Harbin: Harbin University of Science and Technology, 2016.(in Chinese)

S XUE , S Y CHEN , G P TIE , 等 . Adaptive null interferometric test using spatial light modulator for free-form surfaces . Optics Express , 2019 . 27 ( 6 ): 8414 - 8428 . DOI: 10.1364/OE.27.008414 http://doi.org/10.1364/OE.27.008414 .

X MA , S LIU , Z ZHANG , 等 . Error analysis of standard wave-front reconstruction based on spatial light modulator . Proceedings of the SPIE , 2016 . 155 101553M http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2572117 http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2572117 .

LIU S J, XU L B, MA X, et al .. Study on measurement accuracy of active optics null test systems based on liquid crystal spatial light modulator and laser interferometer[C]. SPIE Optical Metrology. Proc SPIE 10329, Optical Measurement Systems for Industrial Inspection X , Munich , Germany , 2017, 1032: 103290A.

马啸 , 刘世杰 , 张志刚 , 等 . 空间光调制器像素尺寸对非球面检测误差影响分析 . 中国激光 , 2017 . 44 ( 1 ): 214 - 220 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjg201701027 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjg201701027 .

X MA , SH J LIU , ZH G ZHANG , 等 . Impact of spatial light modulator pixel pitch on the accuracy of aspheric testing . Chinese Journal of Lasers , 2017 . 44 ( 1 ): 214 - 220 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjg201701027 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjg201701027 .

D G VOELZ . Computational Fourier Optics , : Bellingham SPIE , 2011 . 63 - 82 .

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