Dual-stage piezo nanopositioner for high-speed ion conductance microscopy imaging

Jian ZHUANG; Zhi-wu WANG; Xiao-bo LIAO

doi:10.37188/OPE.20202810.2203

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Dual-stage piezo nanopositioner for high-speed ion conductance microscopy imaging

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-11-16

- Dual-stage piezo nanopositioner for high-speed ion conductance microscopy imaging
- Optics and Precision Engineering Vol. 28, Issue 10, Pages: 2203-2214(2020)
- 作者机构：
  
  1.西安交通大学机械工程学院, 陕西西安 710049
  2.西南科技大学制造科学与工程学院, 四川绵阳 621010
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20202810.2203
  CLC： TN384
- Received：23 April 2020，
  
  Revised：05 June 2020，
  
  Accepted：05 June 2020，
  
  Published：25 October 2020
- 稿件说明：
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Jian ZHUANG, Zhi-wu WANG, Xiao-bo LIAO. Dual-stage piezo nanopositioner for high-speed ion conductance microscopy imaging[J]. Optics and precision engineering, 2020, 28(10): 2203-2214.
DOI：

Jian ZHUANG, Zhi-wu WANG, Xiao-bo LIAO. Dual-stage piezo nanopositioner for high-speed ion conductance microscopy imaging[J]. Optics and precision engineering, 2020, 28(10): 2203-2214. DOI： 10.37188/OPE.20202810.2203.

摘要

为了解决离子电导显微成像系统中传统跳跃工作模式高速扫描时存在的运动过冲以及成像速度慢的问题，提出了一种基于双压电纳米定位平台的高速扫描方法。根据扫描系统需求提出了采用大行程-慢速和小行程-快速压电纳米定位平台串联的设计方案，满足探针

向测量量程要求并可快速回提探针。以菱形位移放大机构和导向机构为构型，设计并确定双压电驱动扫描平台的关键几何参数。基于解析模型计算了定位平台的静力学性能参数并采用有限元分析方法分析了双压电平台的静/动态特性。最后，加工了双压电平台样机并进行了离子电流过冲和形貌扫描成像的测试。实验结果表明：所设计的双压电驱动探针定位平台在保证成像稳定的前提下可使下探速度至少达到500 nm/ms，有效地减小了电流过冲，提高了系统成像效率。

Abstract

To address motion overshoot and low imaging speed of the hopping mode inconventional scanning ion-conductance microscopy (SICM)

this paper proposes a high-speed scanning method based on a dual-stage nanopositioning system. A design scheme consisting of a long-range actuator operating along with a high-speed actuator is proposed

according to the need for the SICM measurement range in the

direction.The pipet probe can approach the sample surface with a highspeed

without contact. Rhombus-type amplification and guiding mechanism are used as the basic configuration.The key parameters of the dual-stage nanopositioner are determined by an analytical modeling. The static and dynamic characteristics of the dual-stage nanopositioner are evaluated via finite-element analysis. The final prototype is processed and overshoot and imaging experiments are performed. Experimental results show that the designed

direction nanopositioning stage driven by the dual actuator can significantly improve the probe approach speed to at least 500 nm/ms

which effectively improves the imaging efficiency of the hopping mode

without reducing the imaging stability.

关键词

Keywords

references

J RHEINLAENDER , T E SCHÄFFER . Mapping the creep compliance of living cells with scanning ion conductance microscopy reveals a subcellular correlation between stiffness and fluidity . Nanoscale , 2019 . 11 ( 14 ): 6982 - 6989 . DOI: 10.1039/C8NR09428D http://doi.org/10.1039/C8NR09428D .

W Q SHI , Y H ZENG , C ZHU , 等 . Characterization of membrane patch-ion channel probes for scanning ion conductance microscopy . Small , 2018 . 14 ( 18 ): 1702945 DOI: 10.1002/smll.201702945 http://doi.org/10.1002/smll.201702945 .

C L BENTLEY , J EDMONDSON , G N MELONI , 等 . Nanoscale electrochemical mapping . Analytical Chemistry , 2019 . 91 ( 1 ): 84 - 108 .

J RHEINLAENDER , N A GEISSE , R PROKSCH , 等 . Comparison of scanning ion conductance microscopy with atomic force microscopy for cell imaging . Langmuir , 2011 . 27 ( 2 ): 697 - 704 . DOI: 10.1021/la103275y http://doi.org/10.1021/la103275y .

P LI , L Q LIU , Y YANG , 等 . In-phase bias modulation mode of scanning ion conductance microscopy with capacitance compensation . IEEE Transactions on Industrial Electronics , 2015 . 62 ( 10 ): 6508 - 6518 . DOI: 10.1109/TIE.2015.2417126 http://doi.org/10.1109/TIE.2015.2417126 .

P NOVAK , C LI , A I SHEVCHUK , 等 . Nanoscale live-cell imaging using hopping probe ion conductance microscopy . Nature Methods , 2009 . 6 ( 4 ): 279 DOI: 10.1038/nmeth.1306 http://doi.org/10.1038/nmeth.1306 .

H IDA , Y TAKAHASHI , A KUMATANI , 等 . High speed scanning ion conductance microscopy for quantitative analysis of nanoscale dynamics of microvilli . Analytical Chemistry , 2017 . 89 ( 11 ): 6015 - 6020 . DOI: 10.1021/acs.analchem.7b00584 http://doi.org/10.1021/acs.analchem.7b00584 .

P NOVAK , A SHEVCHUK , P RUENRAROENGSAK , 等 . Imaging single nanoparticle interactions with human lung cells using fast ion conductance microscopy . Nano Letters , 2014 . 14 ( 3 ): 1202 - 1207 . DOI: 10.1021/nl404068p http://doi.org/10.1021/nl404068p .

S WATANABE , T ANDO . High-speed XYZ-nanopositioner for scanning ion conductance microscopy . Applied Physics Letters , 2017 . 111 ( 11 ): 113106 DOI: 10.1063/1.4993296 http://doi.org/10.1063/1.4993296 .

S SIMEONOV , T E SCHAFFER . High-speed scanning ion conductance microscopy for sub-second topography imaging of live cells . Nanoscale , 2019 . 11 ( 17 ): 8579 - 8587 . DOI: 10.1039/C8NR10162K http://doi.org/10.1039/C8NR10162K .

Y K YONG , S O R MOHEIMANI , B J KENTON , 等 . Invited review article:high-speed flexure-guided nanopositioning:mechanical design and control issues . The Review of Scientific Instruments , 2012 . 83 ( 12 ): 121101 DOI: 10.1063/1.4765048 http://doi.org/10.1063/1.4765048 .

卢倩 , 黄卫清 , 孙梦馨 . 基于柔度比优化设计杠杆式柔性铰链放大机构 . 光学精密工程 , 2016 . 24 ( 1 ): 102 - 111 . http://ope.lightpublishing.cn/thesisDetails?columnId=1804701&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1804701&Fpath=&index=-1&l=zh .

Q LU , W Q HUANG , M X SUN . Optimization design of amplification mechanism for level flexure hinge based on compliance ratio . Opt. Precision Eng. , 2016 . 24 ( 1 ): 102 - 111 . http://ope.lightpublishing.cn/thesisDetails?columnId=1804701&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1804701&Fpath=&index=-1&l=zh .

马立 , 谢炜 , 刘波 , 等 . 柔性铰链微定位平台的设计 . 光学精密工程 , 2014 . 22 ( 2 ): 338 - 345 . http://ope.lightpublishing.cn/thesisDetails?columnId=2227616&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2227616&Fpath=&index=-1&l=zh .

L MA , W XIE , B LIU , 等 . Design of micro-positioning stage with flexure hinge . Opt. Precision Eng. , 2014 . 22 ( 2 ): 338 - 345 . http://ope.lightpublishing.cn/thesisDetails?columnId=2227616&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2227616&Fpath=&index=-1&l=zh .

J CAO , M LING , D J INMAN , 等 . Generalized constitutive equations for piezo-actuated compliant mechanism . Smart Materials and Structures , 2016 . 25 ( 9 ): 095005 DOI: 10.1088/0964-1726/25/9/095005 http://doi.org/10.1088/0964-1726/25/9/095005 .

陈为林 , 卢清华 , 乔健 , 等 . 柔顺桥式位移放大机构的非线性建模与优化 . 光学精密工程 , 2019 . 27 ( 4 ): 849 - 859 . http://ope.lightpublishing.cn/thesisDetails?columnId=1427003&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1427003&Fpath=&index=-1&l=zh .

W L CHEN , Q H LU , J QIAO , 等 . Nonlinearity modeling and optimization of compliant bridge-type displacement amplification mechanism . Opt. Precision Eng. , 2019 . 27 ( 4 ): 849 - 859 . http://ope.lightpublishing.cn/thesisDetails?columnId=1427003&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1427003&Fpath=&index=-1&l=zh .

郭仁飞 , 庄健 , 于德弘 . 用于三维形貌定量测量的调制电流式扫描离子电导显微镜 . 西安交通大学学报 , 2016 . 50 ( 7 ): 83 - 88, 139 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=xajtdxxb201607013 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=xajtdxxb201607013 .

R F GUO , J ZHUANG , D H YU . Three-dimensional quantitative surface topography measurement using modulated-current based scanning ion conductance microscopy . Journal of Xi'an Jiaotong University , 2016 . 50 ( 7 ): 83 - 88, 139 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=xajtdxxb201607013 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=xajtdxxb201607013 .

Y K YONG , S P WADIKHAYE , A J FLEMING . High speed single-and dual-stage vertical positioners . The Review of Scientific Instruments , 2016 . 87 ( 8 ): 085104 DOI: 10.1063/1.4960080 http://doi.org/10.1063/1.4960080 .

D J GUO , W S NAGEL , G M CLAYTON , 等 . Spatial-temporal trajectory redesign for dual-stage nanopositioning systems with application in AFM . ASME Transactions on Mechatronics , 2020 . 25 ( 2 ): 558 - 569 . DOI: 10.1109/TMECH.2020.2971755 http://doi.org/10.1109/TMECH.2020.2971755 .

B J KENTON , A J FLEMING , K K LEANG . Compact ultra-fast vertical nanopositioner for improving scanning probe microscope scan speed . The Review of Scientific Instruments , 2011 . 82 ( 12 ): 123703 DOI: 10.1063/1.3664613 http://doi.org/10.1063/1.3664613 .

LINZ S DEL , E WILLMAN , M CALDWELL , 等 . Contact-free scanning and imaging with the scanning ion conductance microscope . Analytical Chemistry , 2014 . 86 ( 5 ): 2353 - 2360 . DOI: 10.1021/ac402748j http://doi.org/10.1021/ac402748j .

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