Design and application of miniature multi-parameter water quality sensor chip

Xin WANG; Yun-bo SHI

doi:10.37188/OPE.20202810.2215

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Design and application of miniature multi-parameter water quality sensor chip

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-11-16

- Design and application of miniature multi-parameter water quality sensor chip
- Optics and Precision Engineering Vol. 28, Issue 10, Pages: 2215-2226(2020)
- 作者机构：
  
  1.哈尔滨理工大学测控技术与通信工程学院, 黑龙江哈尔滨 150080
  2.苏州大学机电工程学院, 江苏苏州 215301
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20202810.2215
  CLC： TP212.2
- Received：30 April 2020，
  
  Revised：01 June 2020，
  
  Accepted：01 June 2020，
  
  Published：25 October 2020
- 稿件说明：
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Xin WANG, Yun-bo SHI. Design and application of miniature multi-parameter water quality sensor chip[J]. Optics and precision engineering, 2020, 28(10): 2215-2226.
DOI：

Xin WANG, Yun-bo SHI. Design and application of miniature multi-parameter water quality sensor chip[J]. Optics and precision engineering, 2020, 28(10): 2215-2226. DOI： 10.37188/OPE.20202810.2215.

摘要

针对目前水质参数传感器测量功能单一，且受环境温度影响大等问题，提出了一种具有温度补偿功能的多参数水质传感器芯片。该传感器芯片是使用微机电系统（MEMS）技术制造的，芯片表面集成了pH传感器、DO传感器、氨氮传感器和温度传感器。为实现温度补偿，芯片还设计了一种夹心板式蛇形Pt电阻加热器。同时设计了与芯片相适应的微流控测试腔，以实现水样测量。采用有限元稳态热分析对4种加热器热传递过程进行分析，得到合理的芯片结构布局，通过MEMS工艺制作出传感器芯片。采用自制的恒电位仪测试电路，对传感器芯片性能进行了测试。实验结果表明，pH传感器具有0.288 mA/pH的高灵敏度；溶解氧（DO）传感器的灵敏度为2.22

A/（mg·L

-1

）；氨氮传感器的灵敏度为0.113 9 mA/（mg·L

-1

）；温度传感器的灵敏度为0.949 Ω/℃；加热器的功率和温度变化灵敏度为0.312 6℃/mW。与单个水质参数传感器相比，该传感器芯片体积小、坚固耐用，能够同时检测水样的多种参数，且温度补偿效果较好。

Abstract

Water-quality sensors feature a single measurement function and are greatly affected by ambient temperature. This paper proposes a multi-parameter water-quality sensor chip with temperature compensation. The sensor chip was manufactured using the micro-electro-mechanical system (MEMS) technology. The chip surface contained integrated pH

dissolved oxygen (DO)

ammonia-nitrogen

and temperature sensors. To achieve temperature compensation

the chip was also designed with a sandwich-plate snake Pt resistance heater. At the same time

a microfluidic test chamber that was matched with the chip was designed to realize water-sample measurement. Finite-element steady-state thermal analysis was used to analyze the heat-transfer process of four heaters

and a reasonable chip-structure layout was established. Thereafter

the sensor chip was fabricated using the MEMS technology. The performance of the sensor chip was investigated using a laboratory-developed potentiostat test circuit. Experimental results show that the pH sensor has a high sensitivity of 0.288 mA/pH.The sensitivity of the temperature sensor is 0.949 Ω/℃ and that of the ammonia-nitrogen sensor was 0.113 9 mA/(mg·L

-1

). The sensitivity of the DO sensor is 2.22

A/(mg·L

-1

) and that of the temperature sensor

which changes with respect to the heater power

is 0.312 6 ℃/mW. Compared with a single water-quality parameter sensor

the as-prepared sensor chip could simultaneously detect multiple parameters of a water sample and exhibited a good temperature-compensation effect. Moreover

the sensor chip was small in size

robust

and highly accurate.

关键词

Keywords

references

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