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1.哈尔滨工业大学 超精密光电仪器工程研究所, 黑龙江 哈尔滨 150080
2.超精密仪器技术及智能化工业和信息化部重点实验室(哈尔滨工业大学), 黑龙江 哈尔滨 150080
3.北京航天计量测试技术研究所, 北京 100076
4.92493部队计量测试研究所, 辽宁 葫芦岛 125000
Received:07 January 2020,
Revised:09 February 2020,
Accepted:09 February 2020,
Published:25 October 2020
移动端阅览
An JIN, Yin-xiao MIAO, Dong-dong LIU, et al. Research on spindle dynamic rotation-error-measurement technology[J]. Optics and precision engineering, 2020, 28(10): 2227-2243.
An JIN, Yin-xiao MIAO, Dong-dong LIU, et al. Research on spindle dynamic rotation-error-measurement technology[J]. Optics and precision engineering, 2020, 28(10): 2227-2243. DOI: 10.37188/OPE.20202810.2227.
高速电主轴是一种将传统机械主轴中主轴电动机和机床主轴合而为一的新式主轴,因具有高速高精度的优点被大量应用于高性能加工中心。高速电主轴的动态回转特性在很大程度上决定了加工精度,是影响加工中心综合性能的重要因素。主轴运动误差测量方法大致可分为基于位移传感的主轴回转误差测量和基于光学手段的主轴回转误差测量。两类测量手段都是通过测量主轴回转一定角度的位移变化量来解析出主轴的径向回转误差,这两类测量方法在主轴低速运转时具有很好的测量效果。当高速电主轴处于高速工作状态时,这两类测量方法的测量效果将受到传感器件采样频率的限制。本文在总结现有主轴回转误差测量的基础上,提出了一种基于靶标轨迹追踪的主轴动态回转误差测量方法,对现有技术进行了总结,并对未来的发展趋势进行了展望。
High-speed electric spindle is a novel spindle that combines the drive and transmission units of the conventional spindle. The high-speed electric spindle is widely used in high-performance machining centers because of its high speed and high precision. The dynamic rotation characteristics of the spindle greatly determine the machining accuracy of the machining center; thus
it is an important factor that affects the overall performance of the machining center. The research is roughly divided into two types
namely
spindle rotation-error measurement based on displacement sensing and that based on optical methods. These measurement methods aim to determine the radial rotation error of the spindle by measuring the displacement change inthe spindle at a certain angle. These two measurementmethods exhibitgood measurement performancewhen the spindle is running at a low speed. However
when the spindle is operating at a high speed
measurement becomes difficult because of the limitation in the sampling frequency. According to the summary of the methods thatmeasure the spindle rotation error
we propose a measurement method for spindle dynamic rotation error based on target trajectory tracking. Finally
we summarize the existing technology and discuss future research prospects.
陈 循介 . 德国建立世界上第二个机床工业、制造业、工业化强国的道路 . 精密制造与自动化 , 2012 . ( 4 ): 1 - 2, 60 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jmzzyzdh201204001 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jmzzyzdh201204001 .
X J CHEN . The way for Germany to establish the second powerful country of machine tool industry, manufacturing industry and industrialization in the world . Precise Manufacturing & Automation , 2012 . ( 4 ): 1 - 2, 60 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jmzzyzdh201204001 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jmzzyzdh201204001 .
J TLUSTY . Dynamics of high-speed milling . Journal of Engineering for Industry , 1986 . 108 ( 2 ): 59 - 67 . http://ci.nii.ac.jp/naid/80003017331 http://ci.nii.ac.jp/naid/80003017331 .
M HIRAO , J TLUSGY . Effect of negative shear on initial chipping . J Mech Eng Lab. , 1987 . 41 ( 5 ): 215 - 226 .
Y ALTINTAS , I YELLOWLEY , J TLUSTY . The detection of tool breakage in milling operations . Journal of Engineering for Industry , 1988 . 110 ( 3 ): 271 - 277 . DOI: 10.1115/1.3187881 http://doi.org/10.1115/1.3187881 .
J TLUSTY , S SMITH . NC Programming for Quality in Machining , : Dearborn Soc Manufacturing Engineers , 1990 . 483 - 488 .
BRYAN J B. Test gauge for machine tools having non-disengageable servo drives-has two gauge balls held and separated from each other by telescoping fixture and moving to indicate measurement error: US patent, US4435905-A[P].[1984-03-13]
BRYAN JB. Workpiece e.g. metal, surface forming method, involves providing slow tool servo assembly with tool and spindle assembly, where tool assembly is oscillated to remove portions of workpiece for forming axially asymmetric portion: US patent, US2004003689-A1[P].[2004-01-18]. (2006-08-15).
青木 保雄 , 大圆 成夫 . 3点法真円度测定法の展开 . 精密机械[日本] , 1966 . 32 ( 12 ): 37 - 32 .
Y AOKI , S OHBA . The third round method of roundness determination . Precision Machinery , 1966 . 32 ( 12 ): 37 - 32 .
R R DONALDSON . A simple method for separating spindle error from test ball roundness error . Ann Cirp , 1972 . 21 ( 1 ): 125 - 126 . http://ci.nii.ac.jp/naid/10003573344 http://ci.nii.ac.jp/naid/10003573344 .
S NOGUCHI , T TSUKADA , A SAKAMOTO . Evaluation method to determine radial accuracy of high-precision rotating spindle units . Precision Engineering , 1995 . 17 ( 4 ): 266 - 273 . DOI: 10.1016/0141-6359(94)00023-S http://doi.org/10.1016/0141-6359(94)00023-S .
W GAO , S KIYONO , T NOMURA . A new multiprobe method of roundness measurements . Precision Engineering , 1996 . 19 ( 1 ): 37 - 45 . http://www.sciencedirect.com/science/article/pii/0141635996000062 http://www.sciencedirect.com/science/article/pii/0141635996000062 .
W GAO , S KIYONO , T SUGAWARA . High-accuracy roundness measurement by a new error separation method . Precision Engineering , 1997 . 21 ( 2/3 ): 123 - 133 . http://www.onacademic.com/detail/journal_1000034604981110_025e.html http://www.onacademic.com/detail/journal_1000034604981110_025e.html .
R GREJDA , E MARSH , R VALLANCE . Techniques for calibrating spindles with nanometer error motion . Precision Engineering , 2005 . 29 ( 1 ): 113 - 123 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=124954153765e76f32e2484b57e0999a http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=124954153765e76f32e2484b57e0999a .
W GAO , M TANO , T ARAKI , 等 . Measurement and compensation of error motions of a diamond turning machine . Precision Engineering , 2007 . 31 ( 3 ): 310 - 316 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=7ca02cc768ab728caa62234dd71b0fa5 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=7ca02cc768ab728caa62234dd71b0fa5 .
E R MARSH , D A ARNESON , D L MARTIN . A comparison of reversal and multiprobe error separation . Precision Engineering , 2010 . 34 ( 1 ): 85 - 91 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a9831a49fa787958aef94c4b1a796fe1 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a9831a49fa787958aef94c4b1a796fe1 .
J LEE , W GAO , Y SHIMIZU , 等 . Spindle error motion measurement of a large precision roll lathe . International Journal of Precision Engineering and Manufacturing , 2012 . 13 ( 6 ): 861 - 867 . DOI: 10.1007/s12541-012-0112-5 http://doi.org/10.1007/s12541-012-0112-5 .
S CAPPA , D REYNAERTS , F AL-BENDER . A sub-nanometre spindle error motion separation technique . Precision Engineering , 2014 . 38 ( 3 ): 458 - 471 . DOI: 10.1016/j.precisioneng.2013.12.011 http://doi.org/10.1016/j.precisioneng.2013.12.011 .
蔡 鹤皋 . 关于主轴回转运动精度及其动态测量方法的分析 . 哈尔滨工业大学学报 , 1978 . 10 ( 2 ): 56 - 70 . http://www.cnki.com.cn/Article/CJFDTotal-HEBX197802004.htm http://www.cnki.com.cn/Article/CJFDTotal-HEBX197802004.htm .
H G CAI . Analysis of spindle rotation motion accuracy and its dynamic measurement method . Journal of Harbin Institute of Technology , 1978 . 10 ( 2 ): 56 - 70 . http://www.cnki.com.cn/Article/CJFDTotal-HEBX197802004.htm http://www.cnki.com.cn/Article/CJFDTotal-HEBX197802004.htm .
钟 先信 . 高精度主轴回转精度的测量 . 计量技术 , 1982 . ( 5 ): 5 - 11 . http://www.cnki.com.cn/Article/CJFDTotal-JLJS198205001.htm http://www.cnki.com.cn/Article/CJFDTotal-JLJS198205001.htm .
X X ZHONG . Measurement of high precision spindle rotation accuracy . Measurement Technique , 1982 . ( 5 ): 5 - 11 . http://www.cnki.com.cn/Article/CJFDTotal-JLJS198205001.htm http://www.cnki.com.cn/Article/CJFDTotal-JLJS198205001.htm .
洪 迈生 . 应用误差分离技术同时测量和分离机床主轴的径向误差运动和工件的形状误差 . 振动.测试与诊断 , 1983 . 3 ( Z1 ): 1 - 10 . http://www.cnki.com.cn/Article/CJFDTotal-ZDCS1983Z1000.htm http://www.cnki.com.cn/Article/CJFDTotal-ZDCS1983Z1000.htm .
M SH HONG . Applying error separation technique to simultaneously measure and separate the radial error motion of machine tool spindle and the shape error of workpiece . Journal of Vibration, Measurement & Diagnosis , 1983 . 3 ( Z1 ): 1 - 10 . http://www.cnki.com.cn/Article/CJFDTotal-ZDCS1983Z1000.htm http://www.cnki.com.cn/Article/CJFDTotal-ZDCS1983Z1000.htm .
叶 京生 , 顾 启泰 , 章 燕申 . 论多步法误差分离技术的测量精度 . 计量学报 , 1990 . ( 2 ): 119 - 123 . http://www.cnki.com.cn/Article/CJFDTotal-JLXB199002008.htm http://www.cnki.com.cn/Article/CJFDTotal-JLXB199002008.htm .
J SH YE , Q T GU , Y SH ZHANG . Measuring accuracy of errors separation technique by using multistep method . Acta Metrologica Sinica , 1990 . ( 2 ): 119 - 123 . http://www.cnki.com.cn/Article/CJFDTotal-JLXB199002008.htm http://www.cnki.com.cn/Article/CJFDTotal-JLXB199002008.htm .
王 晓慧 , 李 占魁 , 袁 哲俊 . 圆度、圆柱度在线测量及补偿控制实验研究 . 哈尔滨工业大学学报 , 1995 . 27 ( 1 ): 114 - 117 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199500202626 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199500202626 .
X H WANG , ZH K LI , ZH J YUAN . The experimental study of on-line measurement and compensatory control for the roundness and cylindricity . Journal of Harbin Institute of Technology , 1995 . 27 ( 1 ): 114 - 117 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199500202626 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199500202626 .
洪 迈生 , 邓 宗煌 . 圆度和回转运动误差的时域二点法分离技术 . 中国机械工程 , 1997 . 8 ( 2 ): 88 - 89, 92 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199700681568 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199700681568 .
M SH HONG , Z H DENG . A time domain two point method for in situ measurement and separation of roundness and rotating error motion . China Mechanical Engineering , 1997 . 8 ( 2 ): 88 - 89, 92 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199700681568 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199700681568 .
阚 光萍 . 超精密空气主轴回转精度的测量与数据处理 . 航空精密制造技术 , 1999 . 35 ( 3 ): 5 - 7 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hkjmzzjs199903002 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hkjmzzjs199903002 .
G P KAN . Rotation accuracy measurement for super-precision air spindles and its data processing . Aviation Precision Manufacturing Technology , 1999 . 35 ( 3 ): 5 - 7 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hkjmzzjs199903002 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hkjmzzjs199903002 .
陈 海斌 , 程 雪梅 , 钟 先信 . 空气静压轴承主轴回转精度的检测 . 重庆大学学报:自然科学版 , 2000 . 23 ( 1 ): 49 - 52 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=cqdxxb200001013 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=cqdxxb200001013 .
H B CHEN , X M CHENG , X X ZHONG . Test of aerostatic bearings spindle rotary precision . Journal of Chongqing University:Natural Science Edition , 2000 . 23 ( 1 ): 49 - 52 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=cqdxxb200001013 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=cqdxxb200001013 .
洪 迈生 , 邓 宗煌 , 陈 健强 , 等 . 精确的时域三点法圆度误差分离技术 . 上海交通大学学报 , 2000 . 34 ( 10 ): 1317 - 1319 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=shjtdxxb200010003 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=shjtdxxb200010003 .
M SH HONG , Z H DENG , J Q CHEN , 等 . Accurate time domain three point method for error separation of roundness . Journal of Shanghai Jiao Tong University , 2000 . 34 ( 10 ): 1317 - 1319 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=shjtdxxb200010003 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=shjtdxxb200010003 .
谭 久彬 , 赵 维谦 , 杨 文国 . 改善多步法谐波抑制的新方法:鉴相法 . 中国机械工程 , 2001 . 12 ( S1 ): 161 - 162 . http://www.cnki.com.cn/Article/CJFDTotal-ZGJX2001S1057.htm http://www.cnki.com.cn/Article/CJFDTotal-ZGJX2001S1057.htm .
J B TAN , W Q ZHAO , W G YANG . A new error separation method:phase-distinguish method to improve multi-step error separation method . China Mechanical Engineering , 2001 . 12 ( S1 ): 161 - 162 . http://www.cnki.com.cn/Article/CJFDTotal-ZGJX2001S1057.htm http://www.cnki.com.cn/Article/CJFDTotal-ZGJX2001S1057.htm .
黄 长征 , 李 圣怡 . 超精密车床主轴回转精度动态测试仿真 . 计算机仿真 , 2002 . 19 ( 6 ): 96 - 99 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jsjfz200206031 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jsjfz200206031 .
CH ZH HUANG , SH Y LI . The simulation on dynamic measurement of spindle error motions of ultra-precision lathe . Computer Simulation , 2002 . 19 ( 6 ): 96 - 99 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jsjfz200206031 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jsjfz200206031 .
黄 长征 , 李 圣怡 . 超精密车床主轴回转误差运动的动态测试 . 航空精密制造技术 , 2002 . 38 ( 4 ): 1 - 3 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hkjmzzjs200204001 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hkjmzzjs200204001 .
CH ZH HUANG , SH Y LI . Dynamic measurement of spindle error motionof ultraprecision lathe . Aviation Precision Manufacturing Technology , 2002 . 38 ( 4 ): 1 - 3 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hkjmzzjs200204001 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hkjmzzjs200204001 .
苏 恒 , 洪 迈生 , 魏 元雷 , 等 . 机床主轴径向误差运动在线检测与信号处理 . 机械工程学报 , 2002 . 38 ( 6 ): 56 - 60 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxgcxb200206013 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxgcxb200206013 .
H SU , M SH HONG , Y L WEI , 等 . Cnc machine spindle radial motion error on-line test and signal processing . Chinese Journal of Mechanical Engineering , 2002 . 38 ( 6 ): 56 - 60 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxgcxb200206013 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxgcxb200206013 .
苏 恒 , 洪 迈生 , 李 自军 , 等 . 机床主轴运动误差的在线高精度测量 . 制造技术与机床 , 2003 . ( 3 ): 47 - 49 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zzjsyjc200303015 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zzjsyjc200303015 .
H SU , M SH HONG , Z J LI , 等 . On-line high-precision measurement for motion error in machine spindle . Manufacturing Technology & Machine Tool , 2003 . ( 3 ): 47 - 49 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zzjsyjc200303015 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zzjsyjc200303015 .
梁 淑卿 , 孙 宝玉 , 韩 连英 , 等 . 主轴回转精度动态测试 . 长春工业大学学报:自然科学版 , 2004 . 25 ( 2 ): 21 - 23 . http://d.wanfangdata.com.cn/Periodical/jlgxyxb200402008 http://d.wanfangdata.com.cn/Periodical/jlgxyxb200402008 .
SH Q LIANG , B Y SUN , L Y HAN , 等 . Research on the dynamic measurement for the rotation accuracy of a spindle . Journal of Changchun University of Technology:Natural Science Edition , 2004 . 25 ( 2 ): 21 - 23 . http://d.wanfangdata.com.cn/Periodical/jlgxyxb200402008 http://d.wanfangdata.com.cn/Periodical/jlgxyxb200402008 .
S D ASHOK , G L SAMUEL . Modeling, measurement, and evaluation of spindle radial errors in a miniaturized machine tool . The International Journal of Advanced Manufacturing Technology , 2012 . 59 ( 5/6/7/8 ): 445 - 461 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=0992f06cc9b1a9a6b28826a92145a7f6 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=0992f06cc9b1a9a6b28826a92145a7f6 .
L JIN , Z Y YAN , L M XIE , 等 . An experimental investigation of spindle rotary error on high-speed machining center . The International Journal of Advanced Manufacturing Technology , 2014 . 70 ( 1/2/3/4 ): 327 - 334 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=28f54485e2ae88a919f555ef6936d2c2 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=28f54485e2ae88a919f555ef6936d2c2 .
H H PENG , Y J WU , B WANG , 等 . An improved two-point real-time measuring method for radial micro-displacement measurement on high-speed smart boring bar . The International Journal of Advanced Manufacturing Technology , 2015 . 81 ( 5/6/7/8 ): 925 - 933 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=5d9df9de599253b1330d7d1f722e5280 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=5d9df9de599253b1330d7d1f722e5280 .
Y CHEN , X S ZHAO , W G GAO , 等 . A novel multi-probe method for separating spindle radial error from artifact roundness error . The International Journal of Advanced Manufacturing Technology , 2017 . 93 ( 1/2/3/4 ): 623 - 634 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=79a82be03466f695e008f2d6e176aff0 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=79a82be03466f695e008f2d6e176aff0 .
C LIU , W JYWE , H LEE . Development of a simple test device for spindle error measurement using a position sensitive detector . Measurement Science and Technology , 2004 . 15 ( 9 ): 1733 - 1741 . DOI: 10.1088/0957-0233/15/9/009 http://doi.org/10.1088/0957-0233/15/9/009 .
K FUJIMAKI , K MITSUI . Radial error measuring device based on auto-collimation for miniature ultra-high-speed spindles . International Journal of Machine Tools and Manufacture , 2007 . 47 ( 11 ): 1677 - 1685 . DOI: 10.1016/j.ijmachtools.2007.01.002 http://doi.org/10.1016/j.ijmachtools.2007.01.002 .
H F F CASTRO . A method for evaluating spindle rotation errors of machine tools using a laser interferometer . Measurement , 2008 . 41 ( 5 ): 526 - 537 . DOI: 10.1016/j.measurement.2007.06.002 http://doi.org/10.1016/j.measurement.2007.06.002 .
H MURAKAMI , N KAWAGOISHI , E KONDO , 等 . Optical technique to measure five-degree-of-freedom error motions for a high-speed microspindle . International Journal of Precision Engineering and Manufacturing , 2010 . 11 ( 6 ): 845 - 850 . DOI: 10.1007/s12541-010-0102-4 http://doi.org/10.1007/s12541-010-0102-4 .
K P ANANDAN , A S TULSIAN , A DONMEZ , 等 . A Technique for measuring radial error motions of ultra-high-speed miniature spindles used for micromachining . Precision Engineering , 2012 . 36 ( 1 ): 104 - 120 . DOI: 10.1016/j.precisioneng.2011.07.014 http://doi.org/10.1016/j.precisioneng.2011.07.014 .
K P ANANDAN , O B OZDOGANLAR . An LDV-based methodology for measuring axial and radial error motions when using miniature ultra-high-speed (UHS) micromachining spindles . Precision Engineering , 2013 . 37 ( 1 ): 172 - 186 . DOI: 10.1016/j.precisioneng.2012.08.001 http://doi.org/10.1016/j.precisioneng.2012.08.001 .
K P ANANDAN , O B OZDOGANLAR . Analysis of error motions of ultra-high-speed (UHS) micromachining spindles . International Journal of Machine Tools and Manufacture , 2013 . 70 1 - 14 . DOI: 10.1016/j.ijmachtools.2013.02.005 http://doi.org/10.1016/j.ijmachtools.2013.02.005 .
K P ANANDAN , O B OZDOGANLAR . A multi-orientation error separation technique for spindle metrology of miniature ultra-high-speed spindles . Precision Engineering , 2016 . 43 119 - 131 . DOI: 10.1016/j.precisioneng.2015.07.002 http://doi.org/10.1016/j.precisioneng.2015.07.002 .
A GARINEI , R MARSILI . Design of an optical measurement system for dynamic testing of electrospindles . Measurement , 2013 . 46 ( 5 ): 1715 - 1721 . DOI: 10.1016/j.measurement.2013.01.006 http://doi.org/10.1016/j.measurement.2013.01.006 .
C KAVITHA , S D ASHOK . A new approach to spindle radial error evaluation using a machine vision system . Metrology and Measurement Systems , 2017 . 24 ( 1 ): 201 - 219 . DOI: 10.1515/mms-2017-0018 http://doi.org/10.1515/mms-2017-0018 .
娄 志峰 , 郝 秀朋 , 刘 力 , 等 . 圆光栅配合自准直仪测量主轴径向运动误差 . 光学 精密工程 , 2019 . 27 ( 9 ): 2053 - 2061 . http://ope.lightpublishing.cn/thesisDetails?columnId=1427395&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1427395&Fpath=&index=-1&l=zh .
ZH F LOU , X P HAO , L LIU , 等 . Spindle radial motion error measurement using a circular grating and a autocollimator . Opt. Precision Eng. , 2019 . 27 ( 9 ): 2053 - 2061 . http://ope.lightpublishing.cn/thesisDetails?columnId=1427395&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1427395&Fpath=&index=-1&l=zh .
J F TU , B BOSSMANNS , S C C HUNG . Modeling and error analysis for assessing spindle radial error motions . Precision Engineering , 1997 . 21 ( 2/3 ): 90 - 101 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=CC025951901 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=CC025951901 .
何 钦象 , 张 华容 , 杨 静 . 高速电磁主轴回转精度的分析 . 机械科学与技术 , 1999 . 18 ( 4 ): 3 - 5 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199900993293 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199900993293 .
Q X HE , H R ZHANG , J YANG . Analysis of the precision gyration of the spindle supporting magnetic bearings . Mechanical Science and Technology , 1999 . 18 ( 4 ): 3 - 5 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199900993293 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199900993293 .
洪 迈生 , 魏 元雷 , 李 济顺 . 一维和多维误差分离技术的统一理论 . 中国机械工程 , 2000 . 11 ( 3 ): 245 - 248 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjxgc200003002 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjxgc200003002 .
M SH HONG , Y L WEI , J SH LI . Unified theory of one-dimension and multi-dimension error separation techniques . China Mechanical Engineering , 2000 . 11 ( 3 ): 245 - 248 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjxgc200003002 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjxgc200003002 .
洪 迈生 , 蔡 萍 . 多步法误差分离技术的比较分析 . 上海交通大学学报 , 2004 . 38 ( 6 ): 877 - 881 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=shjtdxxb200406007 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=shjtdxxb200406007 .
M SH HONG , P CAI . Analysis and comparison of multi-step error separation technique . Journal of Shanghai Jiao Tong University , 2004 . 38 ( 6 ): 877 - 881 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=shjtdxxb200406007 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=shjtdxxb200406007 .
E MARSH , J COUEY , R VALLANCE . Nanometer-level comparison of three spindle error motion separation techniques . Journal of Manufacturing Science and Engineering , 2006 . 128 ( 1 ): 180 - 187 . DOI: 10.1115/1.2118747 http://doi.org/10.1115/1.2118747 .
陈 清 , 梁 兵 . 主轴径向回转误差测试中的误差分析 . 湖南大学学报:自然科学版 , 2003 . 30 ( 4 ): 23 - 25, 32 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hndxxb200304007 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hndxxb200304007 .
Q CHEN , B LIANG . Error analysis of test errors in radial rotation error of spindle . Journal of Hunan University:Natural Sciences , 2003 . 30 ( 4 ): 23 - 25, 32 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hndxxb200304007 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hndxxb200304007 .
彭 万欢 , 赵 午云 , 陶 继忠 , 等 . 超精密空气静压主轴径向回转误差的测试研究 . 制造技术与机床 , 2008 . ( 10 ): 55 - 58 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zzjsyjc200810019 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zzjsyjc200810019 .
W H PENG , W Y ZHAO , J ZH TAO , 等 . Study on rotational error measurement of ultra-precision aerostatic spindle . Manufacturing Technology & Machine Tool , 2008 . ( 10 ): 55 - 58 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zzjsyjc200810019 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zzjsyjc200810019 .
徐 秀玲 , 姜 军 , 王 红亮 . 机床主轴回转误差测试系统的研究 . 制造技术与机床 , 2008 . ( 10 ): 136 - 139, 154 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zzjsyjc200810046 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zzjsyjc200810046 .
X L XU , J JIANG , H L WANG . Spindle rotation error measuring system . Manufacturing Technology & Machine Tool , 2008 . ( 10 ): 136 - 139, 154 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zzjsyjc200810046 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zzjsyjc200810046 .
X D LU , A JAMALIAN . A new method for characterizing axis of rotation radial error motion:Part 1. Two-dimensional radial error motion theory . Precision Engineering , 2011 . 35 ( 1 ): 73 - 94 . DOI: 10.1016/j.precisioneng.2010.08.005 http://doi.org/10.1016/j.precisioneng.2010.08.005 .
X LU , A JAMALIAN , R GRAETZ . A new method for characterizing axis of rotation radial error motion:Part 2. Experimental results . Precision Engineering-journal of the International Societies for Precision Engineering and Nanotechnology , 2011 . 35 ( 1 ): 95 - 107 .
Q SHU , M Z ZHU , X B LIU , 等 . Radial error motion measurement of ultraprecision axes of rotation with nanometer level precision . Journal of Manufacturing Science and Engineering , 2017 . 139 ( 7 ): 071017 DOI: 10.1115/1.4036349 http://doi.org/10.1115/1.4036349 .
刘 启伟 . 主轴动态回转误差测试及分析 . CADCAM与制造业信息化 , 2013 . ( 2 ): 80 - 84 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=cadcamyzzyxxh201302029 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=cadcamyzzyxxh201302029 .
Q W LIU . Measurement and analysis of spindle dynamic rotation error . Cad/Cam Yu Zhizaoye Xinxihua , 2013 . ( 2 ): 80 - 84 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=cadcamyzzyxxh201302029 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=cadcamyzzyxxh201302029 .
P HUANG , W B LEE , C Y CHAN . Investigation of the effects of spindle unbalance induced error motion on machining accuracy in ultra-precision diamond turning . International Journal of Machine Tools and Manufacture , 2015 . 94 48 - 56 . DOI: 10.1016/j.ijmachtools.2015.04.007 http://doi.org/10.1016/j.ijmachtools.2015.04.007 .
P HUANG , W B LEE , C Y CHAN . Investigation on the position drift of the axis average line of the aerostatic bearing spindle in ultra-precision diamond turning . International Journal of Machine Tools and Manufacture , 2016 . 108 44 - 51 . DOI: 10.1016/j.ijmachtools.2016.05.001 http://doi.org/10.1016/j.ijmachtools.2016.05.001 .
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